Silicon nitride and silicon nitride-rich thin film technologies: trends in deposition techniques and related applications

AE Kaloyeros, FA Jové, J Goff… - ECS Journal of Solid State …, 2017‏ - iopscience.iop.org
This article provides an overview of the state-of-the-art chemistry and processing
technologies for silicon nitride and silicon nitride-rich films, ie, silicon nitride with C inclusion …

Wide-angle perfect absorber/thermal emitter in the terahertz regime

M Diem, T Koschny, CM Soukoulis - Physical Review B—Condensed Matter …, 2009‏ - APS
We show that a perfect absorber/thermal emitter exhibiting an absorption peak of 99.9% can
be achieved in metallic nanostructures that can be easily fabricated. The very high …

Optical properties of silicon nitride films deposited by hot filament chemical vapor deposition

SV Deshpande, E Gulari, SW Brown… - Journal of Applied …, 1995‏ - pubs.aip.org
Silicon nitride films were deposited at low temperatures (245–370° C) and high deposition
rates (500–1700 Å/min) by hot filament assisted chemical vapor deposition (HFCVD) …

AlN barriers for capacitance reduction in phase-change RF switches

G Slovin, M Xu, J Paramesh… - IEEE Electron …, 2016‏ - ieeexplore.ieee.org
We demonstrate four-terminal GeTe-based RF switches with independent thermal actuation
(switching). These devices incorporate an AlN-based dielectric separating high-conductivity …

Electrochemical measurements in in situ TEM experiments

E Fahrenkrug, DH Alsem, N Salmon… - Journal of The …, 2017‏ - iopscience.iop.org
Potential sources of measurement error in electroanalytical analyses performed in-situ
within a transmission electron microscope (TEM) are reported. Some relevant aspects of …

On chip droplet characterization: a practical, high-sensitivity measurement of droplet impedance in digital microfluidics

S Sadeghi, H Ding, GJ Shah, S Chen, PY Keng… - Analytical …, 2012‏ - ACS Publications
We demonstrate a new approach to impedance measurement on digital microfluidics chips
for the purpose of simple, sensitive, and accurate volume and liquid composition …

A tall gate stem GaN HEMT with improved power density and efficiency at Ka-band

PH Lee, YC Lin, HT Hsu, YF Tsao… - IEEE Journal of the …, 2023‏ - ieeexplore.ieee.org
In this letter, AlGaN/GaN HEMTs with tall-gate-stem structures were realized to improve the
power performance of Ka-band devices, and a film thinning process is adopted in the …

Two-to-one internal resonance in the higher-order modes of a MEMS beam: Experimental investigation and theoretical analysis via local stability theory

L Ruzziconi, N Jaber, L Kosuru, ML Bellaredj… - International Journal of …, 2021‏ - Elsevier
The present study is focused on the dynamics of a microbeam-based MEMS device and
analyzes its behavior in the neighborhood of the third natural frequency. An extensive …