In this work, we study the detection of acetylene (C2H2), carbon dioxide (CO2) and water
vapor (H2O) gases in the near-infrared (NIR) range using an on-chip silicon micro-electro …

Optical spectrometers enable contactless chemical analysis. However, decreasing both their
size and cost appears to be a prerequisite to their widespread deployment. Chip-scale …

Portable and handheld spectrometers are being developed and commercialized in the late
few years leveraging the rapidly-progressing technology and triggering new markets in the …

This paper presents the design, fabrication, and characterization of a middle-infrared (MIR)
linear variable optical filter (LVOF) and thermopile detectors that will be used in a …

Miniaturized spectrometers are being developed in the recent few years leveraging the
rapidly-progressing technology and triggering new markets in the field of on-site and mobile …

A novel optical MEMS interferometer is proposed based on spatial splitting and combining of
optical beams using the imaging properties of multimode interference (MMI) waveguides …

In-plane Fabry–Perot cavities based on deeply etched Bragg mirrors are used in many
microphotonic applications including sensing, telecom, and swept laser devices. A main …

Optical phase modulators are essential building components in a wide range of
applications, for instance, optical communication systems, tunable lasers, optical phase …

In this work, the application of the superresolution autoregressive (AR) model to enhance
the resolution of the microelectromechanical systems (MEMS) Fourier transform infrared …

In this paper, we report the analysis, fabrication, and characterization of metallized slotted
micromirrors for optical MEMS applications. A scalar model for the transmittance of the …