Three-dimensional memory device with electrically isolated support pillar structures and method of making thereof

N Hosoda, T Kawamura, Y Furihata… - US Patent …, 2018 - Google Patents
A first tier structure including a first alternating stack of first insulating layers and first
sacrificial material layers is formed over a substrate. First support openings and first memory …

Vertical resistor in 3D memory device with two-tier stack

M Nishikawa, K Funayama, T Miwa… - US Patent 9,691,781, 2017 - Google Patents
(57) ABSTRACT A vertical, columnar resistor in a semiconductor device is provided, along
with techniques for fabricating Such a resistor. The resistor may be provided in a peripheral …

Integrated circuit device including vertical memory device and method of manufacturing the same

KS Kim - US Patent 9,859,207, 2018 - Google Patents
An integrated circuit (IC) device includes: a channel region that extends on the substrate to
penetrate a plurality of word lines; a bit line contact pad that contacts an upper surface of the …

Three-dimensional memory device containing different pedestal width support pillar structures and method of making the same

M Kaminaga - US Patent 10,269,820, 2019 - Google Patents
(57) ABSTRACT A three-dimensional memory device includes an alternating stack having
stepped surfaces and including insulating lay ers and electrically conductive layers, memory …

Non-volatile memory device and method of manufacturing the same

DK Lee - US Patent 9,806,185, 2017 - Google Patents
(74) Attorney, Agent, or Firm—IP & T Group LLP (57) ABSTRACT A non-volatile memory
device and a method of manufac turing the same are provided. The device includes a …

Vertical-type nonvolatile memory device and method of manufacturing the same

P Nam, J Yang, HH Lim, KH Hwang, JY Ahn… - US Patent …, 2016 - Google Patents
A vertical-type nonvolatile memory device includes a first vertical channel structure, and first
and second stacked structure. The first vertical channel structure extends vertically on a …

Semiconductor memory device and method for manufacturing same

T Kamigaichi - US Patent 9,917,096, 2018 - Google Patents
According to one embodiment, a semiconductor memory device includes a stacked body
including a plurality of electrode layers and a plurality of inter-layer insulating layers each …

Three-dimensional memory device with thickened word lines in terrace region

Y Kanno, SK Kanakamedala, RS Makala… - US Patent …, 2019 - Google Patents
A three-dimensional memory device includes an alternating stack of insulating layers and
electrically conductive layers located over a substrate. Memory stack structures are located …

Semiconductor memory devices and methods of fabricating the same

SM Hwang, LIM Joon-Sung, E Cho - US Patent 10,727,244, 2020 - Google Patents
A semiconductor memory device includes a first semiconductor chip and a second
semiconductor chip. Each semiconductor chip of the first and second semiconductor chips …

Three dimensional semiconductor memory devices and methods of fabricating the same

SI Chang, Y Park, J Lee - US Patent 9,385,139, 2016 - Google Patents
A 3D semiconductor device includes an electrode structure has electrodes stacked on a
substrate, semiconductor patterns penetrating the electrode structure, charge storing …