Piezoresistive sensors are among the oldest and most widely used silicon microsystems. Yet
a book dedicated to their design is strangely lacking and most introductory MEMS textbooks …

Abstract Micro-Electro Mechanical Systems (MEMS)-based sensing elements are gaining
wider acceptance and adoption for static and dynamic (mobile) applications. Recent …

Understanding the mechanisms responsible for our sense of hearing requires new tools for
unprecedented stimulation and monitoring of sensory cell mechanotransduction at …

We present high-speed force probes with on-chip actuation and sensing for the
measurement of pN-scale forces at the microsecond timescale. We achieve a high resonant …

Over the years, piezoresistive nano cantilever sensors have been extensively investigated
for various biological sensing applications. Piezoresistive cantilever sensor is a composite …

Over the last decade, surface stress-based piezoresistive cantilever biosensors have been
extensively explored as a potential alternative for conventional clinical diagnostic …

In this work, a steady-state" hot wire" method is developed to study thermal transport around
a microwire in a rare-gas environment. The convection heat transfer coefficient (h) around a …

As a high performance-cost ratio solution for differential pressure measurement, piezo-
resistive differential pressure sensors are widely used in engineering processes. However …

Resonance-based sensors ordinarily show a symmetrical amplitude shape, which is
accompanied by a monotonic transition as its phase response. At its resonance state, there …

MEMS piezoresistive accelerometers are inertial sensors which measure acceleration of the
reference frame to which they are attached. These devices provide extremely localized …