Towards oxide electronics: a roadmap

M Coll, J Fontcuberta, M Althammer, M Bibes… - Applied surface …, 2019 - orbit.dtu.dk
At the end of a rush lasting over half a century, in which CMOS technology has been
experiencing a constant and breathtaking increase of device speed and density, Moore's …

Atomic layer deposition of metal oxides and chalcogenides for high performance transistors

C Shen, Z Yin, F Collins, N Pinna - Advanced Science, 2022 - Wiley Online Library
Atomic layer deposition (ALD) is a deposition technique well‐suited to produce high‐quality
thin film materials at the nanoscale for applications in transistors. This review …

Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review

AJM Mackus, JR Schneider, C MacIsaac… - Chemistry of …, 2018 - ACS Publications
In the past decade, atomic layer deposition (ALD) has become an important thin film
deposition technique for applications in nanoelectronics, catalysis, and other areas due to its …

Atomic layer deposition of functional multicomponent oxides

M Coll, M Napari - APL Materials, 2019 - pubs.aip.org
Advances in the fabrication of multicomponent oxide thin films are crucial to prepare specific
compositions with precise structures and controlled interfaces. This will enable the …

New insights towards strikingly improved room temperature ethanol sensing properties of p-type Ce-doped SnO2 sensors

M Kumar, V Bhatt, AC Abhyankar, J Kim, A Kumar… - Scientific Reports, 2018 - nature.com
In this article, room temperature ethanol sensing behavior of p-type Ce doped SnO2
nanostructures are investigated successfully. Interestingly, it is examined that the abnormal …

Passivation of III–V surfaces with crystalline oxidation

P Laukkanen, MPJ Punkkinen, M Kuzmin… - Applied Physics …, 2021 - pubs.aip.org
Control of interfacial physicochemical properties associated with device materials to
minimize the impact of point defects on device performance has been a dominant theme in …

Rational Bottom-Up Engineering of Electrocatalysts by Atomic Layer Deposition: A Case Study of FexCo1–xSy-Based Catalysts for Electrochemical Hydrogen …

W **ong, Z Guo, H Li, R Zhao, X Wang - ACS Energy Letters, 2017 - ACS Publications
A rational bottom-up engineering strategy for efficient electrocatalysts based on atomic layer
deposition (ALD) is reported. The strategy involves compositional optimization of surface …

Epitaxial κ-Ga2O3/GaN heterostructure for high electron-mobility transistors

HY Kang, MJ Yeom, JY Yang, Y Choi, J Lee… - Materials Today …, 2023 - Elsevier
GaN power technology, especially AlGaN/GaN high electron-mobility transistors (HEMTs),
has made significant progress in recent years. However, the performance of HEMTs is still …

Recent developments in molecular precursors for atomic layer deposition

AL Johnson, JD Parish - 2018 - books.rsc.org
One field of organometallic and materials chemistry that has seen great advancements over
the last 20 years is that of atomic layer deposition (ALD), and in particular the development …

High-performance InAlN/GaN MOSHEMTs enabled by atomic layer epitaxy MgCaO as gate dielectric

H Zhou, X Lou, NJ Conrad, M Si, H Wu… - IEEE Electron …, 2016 - ieeexplore.ieee.org
We have demonstrated high-performance InAlN/GaN MOS high-electron-mobility-transistors
(MOSHEMTs) with various channel lengths () of 85–250 nm using atomic-layer-epitaxy …