Design and analysis of moems based displacement sensor for detection of muscle activity in human body

P Sharan, KV Sandhya, R Barya, M Bansal… - International Journal of …, 2021 - Springer
Proposed work consist of simple and micro size optical MEMS based displacement sensor
for detection of muscle movement in human body. Optical MEMS based structure, analyzed …

[HTML][HTML] A fast multiobjective optimization strategy for single-axis electromagnetic MOEMS micromirrors

F Pieri, A Cilea - Micromachines, 2017 - mdpi.com
Micro-opto-electro-mechanical (MOEMS) micromirrors are an enabling technology for
mobile image projectors (pico-projectors). Low size and low power are the crucial pico …

The spectral element method for the solution of Maxwell's equations

I Semenikhin - Journal of Physics: Conference Series, 2020 - iopscience.iop.org
Among the numerical methods of solving Maxwell's equations for structures with complex
geometry and incorporating various materials, the method of spectral elements is one of the …

Micromirrors

R Carminati, S Costantini - Silicon Sensors and Actuators: The Feynman …, 2022 - Springer
In this chapter, an overview on micromirror actuators is provided, focusing on their main
typologies, the different actuation principles they adopt and the technology platform …

[PDF][PDF] Recent Development in Applications of Optical MEMS: A Review

PK Joshi - Helix, 2018 - academia.edu
Recent development of optical MEMS emphasis on application in the field of
telecommunications, various sensors and micro mirror devices are few examples. Different …

Micromechanical mirror structure with improved mechanical and reflectivity features and corresponding manufacturing process

L Lamagna, S Losa, S Rossini, F Vercesi… - US Patent …, 2021 - Google Patents
A micromechanical mirror structure includes a mirror element designed to reflect an incident
light radiation and a protective structure arranged over the mirror element to provide …