This letter introduces a robust adaptive control methodology for piezo-actuated flexure-
based micro/nano manipulation mechanisms. This special control approach is established …

This paper presents two generalized models that can quickly formulate the closed-form
equations of compliance and precision for multiple-axis flexure hinges including symmetric …

A three-degrees-of-freedom (3-DOF) monolithic compliant parallel micromanipulator with
bridge-type displacement amplifier is presented in this paper. The research aims are to …

Nowadays, those compliant positioning stages with the advantages of compact structure,
micro-displacement output precision and negligible friction have been widely used in ultra …

Piezoelectric actuators (PEA) are devices that are used for nano-microdisplacement due to
their high precision, but one of the major issues is the non-linearity phenomena caused by …

This paper presents the design and experimental investigation of a piezo-driven monolithic
compliant 3-PUU (1 prismatic joint (P-joint) and 2 universal joints (U-joints)) XYZ micro/nano …

Nano-structures such as carbon nanotube, nanobeams, nanorods, nanoplates, nanowires,
and nanorings are tremendously used in various small-scale devices and investigating their …

The article describes the design and modeling of a five-axis monolithic nanopositioning
stage constructed from a bimorph piezoelectric sheet. Six-axis motion is also possible but …

A three degrees of freedom (DOF) monolithic compliant parallel micromanipulator is
presented. The research aim is to design a monolithic mechanism with capability of working …

In micro/nano manipulation mechanisms, the compliant z/tip/tilt stages have proved to have
enormous advantages for out-of-plane positioning. Small workspace is a challenge in …