Multiscale modeling of do** processes in advanced semiconductor devices

N Zographos, C Zechner, I Martin-Bragado… - Materials Science in …, 2017 - Elsevier
The development of advanced semiconductor devices relies heavily on technology
computer-aided design. Front-end process simulators model the fabrication of devices …

Porosity as a function of stoichiometry and implantation temperature in Ge/Si1− xGex alloys

HS Alkhaldi, F Kremer, T Bierschenk… - Journal of Applied …, 2016 - pubs.aip.org
The development of porosity in single-crystal germanium and silicon-germanium alloys (c-Si
1− x Ge x) of (100) orientation was studied under bombardment with 140 keV Ge− ions over …

Substrate orientation dependence on the solid phase epitaxial growth rate of Ge

BL Darby, BR Yates, I Martin-Bragado… - Journal of Applied …, 2013 - pubs.aip.org
The solid phase epitaxial growth process has been studied at 330 C by transmission
electron microscopy for Ge wafers polished at 10–15 increments from the [001] to [011] …

RF plasma treatment of shallow ion-implanted layers of germanium

PN Okholin, VI Glotov, AN Nazarov… - Materials Science in …, 2016 - Elsevier
RF plasma annealing (RFPA) and rapid thermal annealing (RTA) of high-dose implanted n-
type and p-type amorphized Ge layers have been studied by Raman scattering …

Regrowth of Ge with different degrees of damage under thermal and athermal treatment

S Hooda, B Satpati, T Kumar, S Ojha, D Kanjilal… - RSC Advances, 2016 - pubs.rsc.org
In this report, the recrystallization of pre-damaged Ge samples is extensively investigated
under steady-state thermal annealing and ultrafast thermal spike-assisted annealing …

Novel processing for access resistance reduction in Germanium devices

R Duffy, M Shayesteh - 2014 International Workshop on …, 2014 - ieeexplore.ieee.org
This paper reviews the experimental state-of-the-art in access resistance reduction in Ge
devices. Special attention is paid to the do** and thermal annealing state-of-the-art …

Processing of germanium for integrated circuits

RAY DUFFY, M SHAYESTEH… - Turkish Journal of …, 2014 - journals.tubitak.gov.tr
In this review paper the authors will focus on Ge processing for integrated circuits. The key
areas that require the most attention are substrates and integration, gate dielectrics, and …

[KNIHA][B] Phosphorus activation and diffusion in germanium

MA Razali - 2015 - search.proquest.com
Abstract Currently, the International Technology Roadmap for Semiconductors (ITRS) is
targeting the 22nm technology node in accordance with Moore's Law. The low mobility of …

Modeling Two Dimensional Solid Phase Epitaxial Growth for Patterned Ge Substrates

BL Darby, BR Yates, A Kumar, A Kontos… - ECS …, 2013 - iopscience.iop.org
Modeling the two-dimensional (2D) solid phase epitaxial growth (SPEG) of amorphized Ge
has become important due to the renewed interest in Ge as an alternative material in …

[KNIHA][B] Amorphization and solid phase epitaxial growth of germanium

BL Darby - 2012 - search.proquest.com
The substrate orientation dependence on SPEG was studied for the first time in Ge. The
velocity showed a strong dependence on substrate orientation and the [001] direction …