In recent decades, micromachined ultrasonic transducers (MUTs) have been investigated as
an alternative to conventional piezocomposite ultrasonic transducers, primarily due to the …

Laser scanners have been an integral part of MEMS research for more than three decades.
During the last decade, miniaturized projection displays and various medical-imaging …

This paper reviews deposition, integration, and device fabrication of ferroelectric PbZr x Ti 1-
x O 3 (PZT) films for applications in microelectromechanical systems. As examples, a …

This review article is focused on the analysis of the state of the art of sensors for guided
ultrasonic waves for the detection and localization of impacts for structural health monitoring …

This paper provides a detailed overview of developments in transducer materials technology
relating to their current and future applications in micro-scale devices. Recent advances in …

Piezoelectric microelectromechanical systems (MEMS) offer the opportunity for high-
sensitivity sensors and large displacement, low-voltage actuators. In particular, recent …

The piezoelectric and dielectric constants in different crystal orientations of the lead
zirconate titanate (PZT) have been phenomenologically calculated for the compositions near …

This paper presents a 591× 438-DPI ultrasonic fingerprint sensor. The sensor is based on a
piezoelectric micromachined ultrasonic transducer (PMUT) array that is bonded at wafer …

Piezoelectric materials play a crucial role in a large number of devices and applications
modern society would not like to miss. Mobile phones and ultrasonic imaging are just the …

This paper reviews deposition, integration, and device fabrication of PbZr/sub x/Ti/sub 1-
x/O/sub 3/(PZT) films for applications in micro-electromechanical systems. An ultrasonic …