Advanced scanning probe lithography

R Garcia, AW Knoll, E Riedo - Nature nanotechnology, 2014 - nature.com
The nanoscale control afforded by scanning probe microscopes has prompted the
development of a wide variety of scanning-probe-based patterning methods. Some of these …

A review on principles and applications of scanning thermal microscopy (SThM)

Y Zhang, W Zhu, F Hui, M Lanza… - Advanced functional …, 2020 - Wiley Online Library
As the size of materials, particles, and devices shrinks to nanometer, atomic, or even
quantum scale, it is more challenging to characterize their thermal properties reliably …

Thermal scanning probe lithography—a review

ST Howell, A Grushina, F Holzner… - Microsystems & …, 2020 - nature.com
Fundamental aspects and state-of-the-art results of thermal scanning probe lithography (t-
SPL) are reviewed here. t-SPL is an emerging direct-write nanolithography method with …

Scanning thermal microscopy: A review

S Gomès, A Assy, PO Chapuis - physica status solidi (a), 2015 - Wiley Online Library
Fundamental research and continued miniaturization of materials, components and systems
have raised the need for the development of thermal‐investigation methods enabling ultra …

Thermal scanning probe lithography

E Albisetti, A Calò, A Zanut, X Zheng… - Nature Reviews …, 2022 - nature.com
Thermal scanning probe lithography (tSPL) is a nanofabrication method for the chemical
and physical nanopatterning of a large variety of materials and polymer resists with a lateral …

Sub-10 nanometer feature size in silicon using thermal scanning probe lithography

YK Ryu Cho, CD Rawlings, H Wolf, M Spieser, S Bisig… - ACS …, 2017 - ACS Publications
High-resolution lithography often involves thin resist layers which pose a challenge for
pattern characterization. Direct evidence that the pattern was well-defined and can be used …

[HTML][HTML] Crafting at the nanoscale: A comprehensive review of mechanical Atomic force microscopy-based lithography methods and their evolution

L Vincenti, P Pellegrino, M Cascione, V De Matteis… - Materials & Design, 2024 - Elsevier
In recent years, the scientific community's interest in nanoscience and nanotechnology
stems from the increasing capability to manipulate matter at the nanoscale. Nanotechnology …

Evaluating broader impacts of nanoscale thermal transport research

L Shi, C Dames, JR Lukes, P Reddy… - Nanoscale and …, 2015 - Taylor & Francis
The past two decades have witnessed the emergence and rapid growth of the research field
of nanoscale thermal transport. Much of the work in this field has been fundamental studies …

Single nanoparticle detection using photonic crystal enhanced microscopy

Y Zhuo, H Hu, W Chen, M Lu, L Tian, H Yu, KD Long… - Analyst, 2014 - pubs.rsc.org
We demonstrate a label-free biosensor imaging approach that utilizes a photonic crystal
(PC) surface to detect surface attachment of individual dielectric and metal nanoparticles …