BACKGROUND During Substrate processing, Such as etching process, an inner Volume of
a process chamber may be exposed to one or more process gases. Often, Such process …

US8789556B2 - Flow rate control device, diagnostic device for use in flow rate measuring
mechanism or for use in flow rate control device including the flow rate measuring mechanism …

(74) Attorney, Agent, or Firm—Alleman Hall McCoy (51) Int. Cl. Russell & Tuttle LLP
FI6K3I/02(2006.01) FI6K IS/It(2006.01)(57) ABSTRACT FI6K L/42(2006.01) In order to, in a …

US9541098B2 - Low-noise blower - Google Patents US9541098B2 - Low-noise blower -
Google Patents Low-noise blower Download PDF Info Publication number US9541098B2 …

In one embodiment, a control apparatus for delivery of a process gas includes an inlet
conduit; a valve operably coupled to the inlet conduit and alterable between an open …

A flow node includes characterized restrictor in series and adjacent with a valve to provide a
primary flow restriction with a minimized volume between the two. A conductance of the …

(57) ABSTRACT A mass flow control apparatus comprising a proportional valve upstream of
a flow measurement portion, a pressure sensing element fluidly connected to determine a …

(57) ABSTRACT A gas flow monitoring system is provided in process gas lines each
arranged to Supply gas to a predetermined process cham ber via a flow control device, the …

US10495112B2 - Low-noise blower - Google Patents US10495112B2 - Low-noise blower -
Google Patents Low-noise blower Download PDF Info Publication number US10495112B2 …

Described herein is a flow control valve for a ventilator that controls gas flow through a
patient line in response to a target pressure within the line. The valve controls gas flow by (i) …