Nanoscale measurement is an essential task of nanomanufacturing, and measurement
traceability is a fundamental aspect of nanoscale measurement. High-precision nanoscale …

Precise positioning measurement plays an important role in in today advanced
manufacturing industry, and length traceability chain has been optimizing and enriching to …

Atom lithography is a unique method to fabricate self-traceable pitch standards and angle
standards, but extending its structure area to millimeter-level for application is challenging …

Perfectly orthogonal two-dimensional gratings are crucial components in the calibration of
scanning microscopes and displacement measurements of planar encoders. In this study …

A chromium (Cr) grating pitch standard is fabricated by a technique of laser-focused atomic
deposition. Cosine errors of the grating standard are analyzed and controlled under a …

Measurement traceability is a prerequisite for achieving accurate and reliable results as well
as technical standardization. The period of Chromium (Cr) gratings fabricated by atomic …

Chromium atom photolithography gratings are a promising technology for the development
of nanoscale length standard substances due to their high accuracy, uniformity, and …

Laser focused atomic deposition is a unique and effective way to fabricate highly accurate
pitch standards in nanometrology. However, the stability and repeatability of the atom …

We describe the fabrication of a large area of chromium nanogratings formed by laser
focusing techniques. The focusing occurs in an elliptical laser standing-wave field, resulting …

As is well known, the phase-shifting interferometry techniques allow to reach longitudinal
resolution to~ 0.1 nm, but the value of lateral resolution remains at the level of~ 1 mm. For …