This paper reviews the recent advances in reaction-ion etching (RIE) for application in high-
aspect-ratio microfabrication. High-aspect-ratio etching of materials used in micro-and …

Today, the vast majority of microelectromechanical system (MEMS) sensors are
mechanically rigid and therefore suffer from disadvantages when used in intimately …

This tutorial introduces the theoretical and experimental basics of electromagnetically
induced transparency (EIT) in thermal alkali vapors. We first give a brief phenomenological …

Flexible material‐based soft robots are widely used in various areas. In many situations, the
suitable soft robots should be rapidly fabricated to complete the urgent tasks (such as …

Light-driven micro/nano-actuators are one of the most important topics in the biomedical
micro-electromechanical systems (MEMS) field. Currently, their development is hampered …

Self-folding polyhedra have emerged as a viable design strategy for a wide range of
applications, with advances largely made through modeling and experimentation at the …

This paper demonstrates laser forming, localized heating with a laser to induce plastic
deformation, can self-fold 2D printed circuit boards (PCBs) into 3D structures with electronic …

A new micromachined vibrating ring gyroscope (VRG) architecture with low quadrature error
and high-linearity is proposed, which successfully optimizes the working modes to first order …

This paper introduces a novel resonator design for a high-frequency mode-matched pitch (or
roll) gyroscope featuring large excitation amplitude and high Coriolis coupling to address …

This research generalizes the serpentine hinge design and concept by studying the straight-
axis folded flexure hinge as a large-displacement counterpart of shape-similar, solid notch …