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Ultrasonic inspection and self-healing of Ge and 3C-SiC semiconductor membranes
LQ Zhou, G Colston, M Myronov… - Journal of …, 2020 - ieeexplore.ieee.org
Knowledge of the mechanical properties and stability of thin film structures is important for
device operation. Potential failures related to crack initiation and growth must be identified …
device operation. Potential failures related to crack initiation and growth must be identified …