Recent trends in piezoelectric actuators for precision motion and their applications: A review

S Mohith, AR Upadhya, KP Navin… - Smart Materials and …, 2020 - iopscience.iop.org
The need for precision positioning applications has enormously influenced the research and
development towards the growth of precision actuators. Over the years, piezoelectric …

Modeling and control of piezo-actuated nanopositioning stages: A survey

GY Gu, LM Zhu, CY Su, H Ding… - IEEE Transactions on …, 2014 - ieeexplore.ieee.org
Piezo-actuated stages have become more and more promising in nanopositioning
applications due to the excellent advantages of the fast response time, large mechanical …

Design and Development of a Compact Flexure-Based Precision Positioning System With Centimeter Range

Q Xu - IEEE Transactions on Industrial Electronics, 2013 - ieeexplore.ieee.org
This paper presents the design and development of a novel flexure parallel-kinematics
precision positioning stage with a centimeter range and compact dimension. The stage …

Motion control of piezoelectric positioning stages: modeling, controller design, and experimental evaluation

GY Gu, LM Zhu, CY Su, H Ding - IEEE/ASME Transactions on …, 2012 - ieeexplore.ieee.org
In this paper, a general skeleton on modeling, controller design, and applications of the
piezoelectric positioning stages is presented. Toward this framework, a general model is first …

Investigation on the development and building of a voice coil actuator-driven XY micro-motion stage with dual-range capabilities

PP Raut, AS Rao, S Sollapur, DD Baviskar - International Journal on …, 2024 - Springer
A growing trend in the utilization of compliant micro-motion stages, which offer exceptional
precision and repeatability in positioning. These stages enable the creation of dual-range …

Development of a nanopositioning platform with large travel range based on bionic quadruped piezoelectric actuator

J Deng, Y Liu, S Zhang, J Li - IEEE/ASME Transactions on …, 2020 - ieeexplore.ieee.org
A piezoelectric platform driven by a bionic quadruped piezoelectric actuator is developed. It
uses the operating principle of combining bionic walking and swinging actuation modes to …

Real-time inverse hysteresis compensation of piezoelectric actuators with a modified Prandtl-Ishlinskii model

GY Gu, MJ Yang, LM Zhu - Review of Scientific Instruments, 2012 - pubs.aip.org
This paper presents a novel real-time inverse hysteresis compensation method for
piezoelectric actuators exhibiting asymmetric hysteresis effect. The proposed method …

Development of a planar piezoelectric actuator using bending–bending hybrid transducers

J Deng, Y Liu, J Liu, D Xu… - IEEE Transactions on …, 2018 - ieeexplore.ieee.org
A planar piezoelectric actuator with large travel range is presented in this paper. The
actuator is composed of four uniform piezoelectric transducers, and each transducer can …

Optimum design of a piezo-actuated triaxial compliant mechanism for nanocutting

Z Zhu, S To, WL Zhu, Y Li… - IEEE Transactions on …, 2017 - ieeexplore.ieee.org
A novel piezo-actuated compliant mechanism is developed to obtain triaxial translational
motions with decoupled features for nanocutting. Analytical modeling of the working …

Development of a piezoelectrically actuated two-degree-of-freedom fast tool servo with decoupled motions for micro-/nanomachining

Z Zhu, X Zhou, Z Liu, R Wang, L Zhu - Precision Engineering, 2014 - Elsevier
The limited degrees of freedom (DOFs) of servo motions is an inherent deficiency in
conventional, fast-tool-servo-(FTS)-assisted, diamond-turning, highly blocking applications …