New insights on Ni-Si system for microelectronics applications
Metal silicides and their nanostructures have been found to be suitable candidates for
device manufacturing in contemporary microelectronics industries to reduce contact …
device manufacturing in contemporary microelectronics industries to reduce contact …
Texture in thin film silicides and germanides: A review
B De Schutter, K De Keyser, C Lavoie… - Applied Physics …, 2016 - pubs.aip.org
Silicides and germanides are compounds consisting of a metal and silicon or germanium. In
the microelectronics industry, silicides are the material of choice for contacting silicon based …
the microelectronics industry, silicides are the material of choice for contacting silicon based …
Dewetting of Ni silicide thin film on Si substrate: In-situ experimental study and phase-field modeling
In this paper, the in-situ Scanning Electron Microscopy (in-situ SEM) technique and three-
dimensional (3-D) phase-field simulation were combined to perform a comprehensive study …
dimensional (3-D) phase-field simulation were combined to perform a comprehensive study …
Reconfigurable Complementary and Combinational Logic Based on Monolithic and Single‐Crystalline Al‐Si Heterostructures
Metal‐semiconductor heterostructures providing geometrically reproducible and abrupt
Schottky nanojunctions are highly anticipated for the realization of emerging electronic …
Schottky nanojunctions are highly anticipated for the realization of emerging electronic …
Nanoscale effect on the formation of the amorphous Ni silicide by rapid thermal annealing from crystalline and pre-amorphized silicon
C Delwail, K Dabertrand, S Joblot, F Mazen… - Acta Materialia, 2024 - Elsevier
The Ni monosilicide alloyed with Pt is widely used as contact material in advanced
microelectronics devices and a good knowledge of silicide formation kinetics is required for …
microelectronics devices and a good knowledge of silicide formation kinetics is required for …
Challenges of nickel silicidation in CMOS technologies
In this paper, we review some of the key challenges associated with the Ni silicidation
process in the most recent CMOS technologies. The introduction of new materials (eg SiGe) …
process in the most recent CMOS technologies. The introduction of new materials (eg SiGe) …
Impact of alloying elements (Co, Pt) on nickel stanogermanide formation
A Quintero, P Gergaud, JM Hartmann, V Reboud… - Materials Science in …, 2020 - Elsevier
The impact of Pt or Co as alloying elements for Ni-based metallization of GeSn layers has
been investigated. As far as the solid-state reaction is concerned, the overall phase …
been investigated. As far as the solid-state reaction is concerned, the overall phase …
Contacts in advanced CMOS: History and emerging challenges
Silicide materials used as contacts in CMOS devices have evolved over many technology
nodes. This article traces the often forgotten defectivity related reasons that were the primary …
nodes. This article traces the often forgotten defectivity related reasons that were the primary …
The NiSi melting curve to 70 GPa
The melting curve of NiSi has been determined to 70 GPa on the basis of laser-heated
diamond anvil cell (LH-DAC) experiments in which changes in the gradient of temperature …
diamond anvil cell (LH-DAC) experiments in which changes in the gradient of temperature …
Snowplow effect and reactive diffusion in the Pt doped Ni–Si system
The redistribution of Pt after heat treatment at 290° C for 1h has been analyzed by large-
angle atom probe tomography assisted by femtosecond laser pulses. Two silicides Ni2Si …
angle atom probe tomography assisted by femtosecond laser pulses. Two silicides Ni2Si …