New insights on Ni-Si system for microelectronics applications

RK Pandey, G Maity, S Pathak, P Kalita… - Microelectronic …, 2022 - Elsevier
Metal silicides and their nanostructures have been found to be suitable candidates for
device manufacturing in contemporary microelectronics industries to reduce contact …

Texture in thin film silicides and germanides: A review

B De Schutter, K De Keyser, C Lavoie… - Applied Physics …, 2016 - pubs.aip.org
Silicides and germanides are compounds consisting of a metal and silicon or germanium. In
the microelectronics industry, silicides are the material of choice for contacting silicon based …

Dewetting of Ni silicide thin film on Si substrate: In-situ experimental study and phase-field modeling

J Gao, A Malchère, S Yang, A Campos, T Luo… - Acta Materialia, 2022 - Elsevier
In this paper, the in-situ Scanning Electron Microscopy (in-situ SEM) technique and three-
dimensional (3-D) phase-field simulation were combined to perform a comprehensive study …

Reconfigurable Complementary and Combinational Logic Based on Monolithic and Single‐Crystalline Al‐Si Heterostructures

R Böckle, M Sistani, M Bažíková, L Wind… - Advanced Electronic …, 2023 - Wiley Online Library
Metal‐semiconductor heterostructures providing geometrically reproducible and abrupt
Schottky nanojunctions are highly anticipated for the realization of emerging electronic …

Nanoscale effect on the formation of the amorphous Ni silicide by rapid thermal annealing from crystalline and pre-amorphized silicon

C Delwail, K Dabertrand, S Joblot, F Mazen… - Acta Materialia, 2024 - Elsevier
The Ni monosilicide alloyed with Pt is widely used as contact material in advanced
microelectronics devices and a good knowledge of silicide formation kinetics is required for …

Challenges of nickel silicidation in CMOS technologies

N Breil, C Lavoie, A Ozcan, F Baumann… - Microelectronic …, 2015 - Elsevier
In this paper, we review some of the key challenges associated with the Ni silicidation
process in the most recent CMOS technologies. The introduction of new materials (eg SiGe) …

Impact of alloying elements (Co, Pt) on nickel stanogermanide formation

A Quintero, P Gergaud, JM Hartmann, V Reboud… - Materials Science in …, 2020 - Elsevier
The impact of Pt or Co as alloying elements for Ni-based metallization of GeSn layers has
been investigated. As far as the solid-state reaction is concerned, the overall phase …

Contacts in advanced CMOS: History and emerging challenges

C Lavoie, P Adusumilli, AV Carr, JSJ Sweet… - ECS …, 2017 - iopscience.iop.org
Silicide materials used as contacts in CMOS devices have evolved over many technology
nodes. This article traces the often forgotten defectivity related reasons that were the primary …

The NiSi melting curve to 70 GPa

OT Lord, ETH Wann, SA Hunt, AM Walker… - Physics of the Earth and …, 2014 - Elsevier
The melting curve of NiSi has been determined to 70 GPa on the basis of laser-heated
diamond anvil cell (LH-DAC) experiments in which changes in the gradient of temperature …

Snowplow effect and reactive diffusion in the Pt doped Ni–Si system

O Cojocaru-Mirédin, D Mangelinck, K Hoummada… - Scripta materialia, 2007 - Elsevier
The redistribution of Pt after heat treatment at 290° C for 1h has been analyzed by large-
angle atom probe tomography assisted by femtosecond laser pulses. Two silicides Ni2Si …