Atomic layer deposition: an overview

SM George - Chemical reviews, 2010 - ACS Publications
Atomic Layer Deposition: An Overview | Chemical Reviews ACS ACS Publications C&EN CAS
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Localized surface plasmon resonance spectroscopy and sensing

KA Willets, RP Van Duyne - Annu. Rev. Phys. Chem., 2007 - annualreviews.org
Localized surface plasmon resonance (LSPR) spectroscopy of metallic nanoparticles is a
powerful technique for chemical and biological sensing experiments. Moreover, the LSPR is …

Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

RL Puurunen - Journal of applied physics, 2005 - pubs.aip.org
Atomic layer deposition (ALD), a chemical vapor deposition technique based on sequential
self-terminating gas–solid reactions, has for about four decades been applied for …

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

V Miikkulainen, M Leskelä, M Ritala… - Journal of Applied …, 2013 - pubs.aip.org
Atomic layer deposition (ALD) is gaining attention as a thin film deposition method, uniquely
suitable for depositing uniform and conformal films on complex three-dimensional …

Wide band gap chalcogenide semiconductors

R Woods-Robinson, Y Han, H Zhang, T Ablekim… - Chemical …, 2020 - ACS Publications
Wide band gap semiconductors are essential for today's electronic devices and energy
applications because of their high optical transparency, controllable carrier concentration …

Molecular interactions driving the layer-by-layer assembly of multilayers

J Borges, JF Mano - Chemical reviews, 2014 - ACS Publications
Over the last few decades there has been a huge interest in nanostructured functional
materials and assembly techniques for preparing functional molecular assemblies with …

Advances in top–down and bottom–up surface nanofabrication: Techniques, applications & future prospects

A Biswas, IS Bayer, AS Biris, T Wang, E Dervishi… - Advances in colloid and …, 2012 - Elsevier
This review highlights the most significant advances of the nanofabrication techniques
reported over the past decade with a particular focus on the approaches tailored towards the …

Recent progress in phase-change memory technology

GW Burr, MJ Brightsky, A Sebastian… - IEEE Journal on …, 2016 - ieeexplore.ieee.org
We survey progress in the PCM field over the past five years, ranging from large-scale PCM
demonstrations to materials improvements for high–temperature retention and faster …

ZnO nanotube based dye-sensitized solar cells

ABF Martinson, JW Elam, JT Hupp, MJ Pellin - Nano letters, 2007 - ACS Publications
We introduce high surface area ZnO nanotube photoanodes templated by anodic aluminum
oxide for use in dye-sensitized solar cells (DSSCs). Atomic layer deposition is utilized to coat …

Applications of atomic layer deposition to nanofabrication and emerging nanodevices

H Kim, WJ Maeng - Thin solid films, 2009 - Elsevier
Recently, with scaling down of semiconductor devices, need for nanotechnology has
increased enormously. For nanoscale devices especially, each of the layers should be as …