[HTML][HTML] ALD and PEALD deposition of HfO2 and its effects on the nature of oxygen vacancies

MA Martínez-Puente, P Horley… - Materials Science and …, 2022 - Elsevier
The high-k materials are essential in thin-film transistors. A well-controlled thin film
deposition that produces less electronic defects induced by charged vacancies is highly …

Ferroelectric devices for content-addressable memory

M Tarkov, F Tikhonenko, V Popov, V Antonov… - Nanomaterials, 2022 - mdpi.com
In-memory computing is an attractive solution for reducing power consumption and memory
access latency cost by performing certain computations directly in memory without reading …

Investigation of the hydrophilic nature and surface energy changes of HfO2 thin films prepared by atomic layer deposition

S Lee, H Yoon, S Lee, S Chung, H Kim - Vacuum, 2024 - Elsevier
The wettability of metal oxides, which is directly related to the surface free energy (SFE), is
used in a wide range of robust functional coatings, from hydrophilic to hydrophobic. Because …

Transition between resistive switching modes in asymmetric HfO2-based structures

OO Permiakova, AE Rogozhin, AV Miakonkikh… - Microelectronic …, 2023 - Elsevier
We claim that the evolution of conductive filaments (CF) in bipolar resistive switching (BRS)
and complementary resistive switching (CRS) is similar in HfO 2-based structures with one …

Mechanisms of conductive filament formation in hafnium oxide multilayer structures

AG Isaev, OО Permyakova, AЕ Rogozhin - Thin Solid Films, 2023 - Elsevier
The paper describes an investigation of resistive switching in the Pt/HfO 2/HfO x N y/TiN,
Pt/HfO 2/TaO x N y/TiN, and Pt/Al 2 O 3/HfO 2/TaO x N y/TiN structures with oxide layers …

Robust semiconductor-on-ferroelectric structures with hafnia–zirconia–alumina UTBOX stacks compatible with CMOS technology

VP Popov, VA Antonov, FV Tikhonenko… - Journal of Physics D …, 2021 - iopscience.iop.org
Silicon wafers with an ultrathin buried high-k oxide were fabricated by the atomic layer
deposition of high-k layers on sapphire and silicon substrates with subsequent silicon layer …

Ferroelectric properties of SOS and SOI pseudo-MOSFETs with HfO2 interlayers

VP Popov, VA Antonov, MA Ilnitsky, IE Tyschenko… - Solid-State …, 2019 - Elsevier
The formation of a multi-crystalline HfO 2 film, containing the ferroelectric phase OII (Pmn2 1)
after a high-temperature annealing at 1100° C, was experimentally observed by HREM for …

Latent Reliability Degradation of Ultrathin Amorphous HfO2 Dielectric After Heavy Ion Irradiation: The Impact of Nano-Crystallization

Z Li, J Liu, P Zhai, T Liu, J Bi, Z Zhang… - IEEE Electron …, 2019 - ieeexplore.ieee.org
The reliability degradation of HfO 2-based devices under heavy ion irradiation is still an
open question. In this letter, the ultrathin amorphous HfO 2 gate stacks were irradiated by …

Thermal stability of ferroelectric films based on hafnium–zirconium dioxide on silicon

VP Popov, VA Antonov, FV Tikhonenko… - Bulletin of the Russian …, 2023 - Springer
Results are presented that testify to an increase in the thermal stability and structural and
electrical properties of films obtained via plasma-stimulated atomic layer deposition …

Logic elements and crossbar architecture based on SOI two-gate ferroelectric transistors

M Tarkov, A Leushin, F Tikhonenlo… - … Integration on Silicon …, 2020 - ieeexplore.ieee.org
A two-gate ferroelectric SOI transistor is proposed as the basic element for a content-
addressable memory which will ensure the transition from simple crossbar matrices to deep …