Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues
Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …
Design, Identification, and Control of a Flexure-Based XY Stage for Fast Nanoscale Positioning
The design, identification, and control of a novel, flexure-based, piezoelectric stack-actuated
XY nanopositioning stage are presented in this paper. The main goal of the design is to …
XY nanopositioning stage are presented in this paper. The main goal of the design is to …
Design and computational optimization of a decoupled 2-DOF monolithic mechanism
This paper presents the mechanical design, computational optimization, and
experimentation of a decoupled 2-DOF monolithic mechanism. In the mechanical design …
experimentation of a decoupled 2-DOF monolithic mechanism. In the mechanical design …
Design, modeling, and FPAA-based control of a high-speed atomic force microscope nanopositioner
An XYZ nanopositioner is designed for fast the atomic force microscopy. The first resonant
modes of the device are measured at 8.8, 8.9, and 48.4 kHz along the X-, Y-, and Z-axes …
modes of the device are measured at 8.8, 8.9, and 48.4 kHz along the X-, Y-, and Z-axes …
Kinetostatic modeling of 3-RRR compliant micro-motion stages with flexure hinges
This paper presents the derivation of the kinetostatic model of a flexure-based 3-RRR
compliant micro-motion stage. The kinetostatic model has closed-form equations and flexure …
compliant micro-motion stage. The kinetostatic model has closed-form equations and flexure …
A new pseudo-rigid-body model approach for modeling the quasi-static response of planar flexure-hinge mechanisms
In this paper a new pseudo-rigid-body model (PRBM) of flexure hinges used in planar
flexure-hinge mechanisms with small deformations is presented. Unlike the 1-DOF freedom …
flexure-hinge mechanisms with small deformations is presented. Unlike the 1-DOF freedom …
Design and computational optimization of a flexure-based XY positioning platform using FEA-based response surface methodology
SC Huang, TP Dao - International Journal of Precision Engineering and …, 2016 - Springer
This paper presents the mechanical design and computational optimization for a flexure-
based XY positioning platform that is capable of performing planar translational motion with …
based XY positioning platform that is capable of performing planar translational motion with …
A novel voice coil motor-driven compliant micropositioning stage based on flexure mechanism
J Shang, Y Tian, Z Li, F Wang, K Cai - Review of Scientific Instruments, 2015 - pubs.aip.org
This paper presents a 2-degrees of freedom flexure-based micropositioning stage with a
flexible decoupling mechanism. The stage is composed of an upper planar stage and four …
flexible decoupling mechanism. The stage is composed of an upper planar stage and four …
Reducing cross-coupling in a compliant XY nanopositioner for fast and accurate raster scanning
A compliant XY nanopositioner is presented in this brief. The device is designed to have a
very low cross-coupling between the X-and Y-axis. Despite this, during high-speed raster …
very low cross-coupling between the X-and Y-axis. Despite this, during high-speed raster …
Design, analysis and testing of a parallel-kinematic high-bandwidth XY nanopositioning stage
This paper presents the design, analysis, and testing of a parallel-kinematic high-bandwidth
XY nanopositioning stage driven by piezoelectric stack actuators. The stage is designed with …
XY nanopositioning stage driven by piezoelectric stack actuators. The stage is designed with …