[HTML][HTML] Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications

YQ Fu, JK Luo, NT Nguyen, AJ Walton… - Progress in Materials …, 2017‏ - Elsevier
Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN)
have found a broad range of lab-on-chip applications such as biosensing, particle/cell …

Piezoelectric MEMS based acoustic sensors: A review

WR Ali, M Prasad - Sensors and Actuators A: Physical, 2020‏ - Elsevier
This paper discusses piezoelectric acoustic devices based on widely used piezoelectric
materials. Commonly used piezoelectric thin film deposition techniques and the influence of …

Polarity in GaN and ZnO: Theory, measurement, growth, and devices

J Zuniga-Perez, V Consonni, L Lymperakis… - Applied Physics …, 2016‏ - pubs.aip.org
The polar nature of the wurtzite crystalline structure of GaN and ZnO results in the existence
of a spontaneous electric polarization within these materials and their associated alloys (Ga …

Catalyst-free growth of ZnO nanowires by metal-organic chemical vapour deposition (MOCVD) and thermal evaporation

W Lee, MC Jeong, JM Myoung - Acta Materialia, 2004‏ - Elsevier
ZnO nanowires were grown on GaAs (002) substrates using metal-organic chemical vapour
deposition (MOCVD) and on Si (001) substrates using thermal evaporation of source …

Growth and characterisation of electrodeposited ZnO thin films

JS Wellings, NB Chaure, SN Heavens, IM Dharmadasa - Thin solid films, 2008‏ - Elsevier
The electrochemical method has been used to deposit zinc oxide (ZnO) thin films from
aqueous zinc nitrate solution at 80° C onto fluorine doped tin oxide (FTO) coated glass …

Formation of highly aligned ZnO tubes on sapphire (0001) substrates

BP Zhang, NT Binh, K Wakatsuki, Y Segawa… - Applied physics …, 2004‏ - pubs.aip.org
ZnO tubes were epitaxially grown on sapphire (0001) substrates by metalorganic chemical
vapor deposition. The tubes grew along the substrate normal and were characterized by …

Structure and properties of transparent conductive doped ZnO films by pulsed laser deposition

SM Park, T Ikegami, K Ebihara, PK Shin - Applied Surface Science, 2006‏ - Elsevier
High quality transparent conductive ZnO thin films were deposited on quartz glass
substrates using pulsed laser deposition (PLD). We varied the growth conditions such as the …

Solvothermal growth of ZnO

D Ehrentraut, H Sato, Y Kagamitani, H Sato… - Progress in crystal …, 2006‏ - Elsevier
The growth of ZnO single crystals and crystalline films by solvothermal techniques is
reviewed. Largest ZnO crystals of 3 inch in diameter are grown by a high-pressure medium …

Growth of ZnO∕ MgZnO quantum wells on sapphire substrates and observation of the two-dimensional confinement effect

BP Zhang, NT Binh, K Wakatsuki, CY Liu… - Applied Physics …, 2005‏ - pubs.aip.org
Zn O∕ Mg Zn O single quantum wells (QWs) in which the well width changes continuously
were grown on sapphire (11 2 0) substrates by metalorganic chemical vapor deposition …

Growth of high-quality ZnMgO epilayers and ZnO∕ ZnMgO quantum well structures by radical-source molecular-beam epitaxy on sapphire

S Sadofev, S Blumstengel, J Cui, J Puls… - Applied Physics …, 2005‏ - pubs.aip.org
We report on a specific growth procedure combining low-temperature growth of ZnMgO and
postgrowth annealing at intermediate temperatures. Despite the large lattice misfit induced …