This review covers important advances in recent years in the physics of thin-film ferroelectric
oxides, the strongest emphasis being on those aspects particular to ferroelectrics in thin-film …

This paper reviews deposition, integration, and device fabrication of ferroelectric PbZr x Ti 1-
x O 3 (PZT) films for applications in microelectromechanical systems. As examples, a …

Ferroelectric materials have switchable electrical polarization that is appealing for high-
density nonvolatile memories. However, inevitable fatigue hinders practical applications of …

Ferroelectric hafnium zirconium oxide holds great promise for a broad spectrum of
complementary metal–oxide–semiconductor (CMOS) compatible and scaled microelectronic …

Crystallographic texturing of polycrystalline ferroelectric ceramics offers a means of
achieving significant enhancements in the piezoelectric response. Templated grain growth …

The broad spectrum of electronic and optical properties exhibited by oxides offers
tremendous opportunities for microelectronic devices, especially when a combination of …

There has been a resurgence of complex oxides of late owing to their ferroelectric and
ferromagnetic properties. Although these properties had been recognized decades ago, the …

Single-crystalline thin films of complex oxides show a rich variety of functional properties
such as ferroelectricity, piezoelectricity, ferro and antiferromagnetism and so on that have …

Ferroelectric hafnium oxides are poised to impact a wide range of microelectronic
applications owing to their superior thickness scaling of ferroelectric stability and …

This paper reviews deposition, integration, and device fabrication of PbZr/sub x/Ti/sub 1-
x/O/sub 3/(PZT) films for applications in micro-electromechanical systems. An ultrasonic …