Dimensional parameters are the most commonly encountered quality characteristics of
workpieces. The measuring process for testing conformance of those characteristics …

The need for dimensional micro and nano metrology is evident, and as critical dimensions
are scaled down and geometrical complexity of objects is increased, the available …

Explaining principles underlying the main micromachining practices currently being used
and developed in industrial countries around the world, Micromachining of Engineering …

Non-destructive measurements of high aspect ratio microscale features, especially those
with internal geometries such as micro-holes, remain a challenging metrology problem that …

This paper presents the development of a new probing method for coordinate measuring
machines (CMM) to inspect the diameter and form of small holes. The technique, referred to …

The geometrical characteristics of the micro-holes and the consistency of spatial distribution
among the micro-holes in the micro-hole array fabricated by laser beam drilling (LBD) …

The form measurement and gauge repeatability and reproducibility (R&R) of a micro-hole
using a coordinate measurement machine (CMM) with a combination of optical and contact …

The precise measurement of microstructures and other micron-sized materials has garnered
considerable interest in recent years. However, a limited measurement region and the …

Edited by prominent researchers and with contributions from experts in their individual
areas, Intelligent Energy Field Manufacturing: Interdisciplinary Process Innovations explores …

This paper presents a system for measuring micro holes that makes use of an optical fiber
probe. The optical fiber probe is deflected when it comes into contact with a hole surface …