An extensive review is given of the results from literature on electron beam induced
deposition. Electron beam induced deposition is a complex process, where many and often …

Publisher Summary Electron beam-induced deposition (EBID) is a technique to directly
deposit structures on a target by the electron‐induced dissociation of adsorbed precursor …

* A special volume devoted principally to therole of the late Sir Charles Oatley in the
development of the scanning electron microscopeings* It contains historical articles and …

Electron-beam deposition is used to fabricate free-standing carbon nanoelectrodes
separated by a gap of less than 5 nm. Fabrication is carried out under direct visual control in …

Electron-beam-induced deposition was performed to fabricate nanostructures using a
subnanometer-sized probe of high-energy electrons emitted by a 200 kV transmission …

We present evidence that during focused electron beam induced deposition of 3D micro-and
nanostructures, different growth rates are obtained when scanning the beam towards …

We have successfully fabricated nano‐dots containing tungsten or gold from metal‐organic
gas sources by electron beam‐induced deposition in an ultrahigh vacuum transmission …

The effect of the accelerating voltage of incident electrons on the resolution of electron-beam-
induced deposition was investigated by a dynamic Monte Carlo profile simulator which …

We have successfully fabricated nano-dots containing W from a metal–organic gas source
by electron-beam-induced deposition in an ultra-high vacuum transmission electron …

The features of self-supporting tungsten nanowire fabricated by electron-beam-induced
deposition using 200 keV electrons were investigated. The width of wire first decreases with …