Integration of superconducting nanowire single-photon detectors with nanophotonic
waveguides is a key technological step that enables a broad range of classical and quantum …

In this review we present some of the recent advances in the field of silicon nitride photonic
integrated circuits. The review focuses on the material deposition techniques currently …

In one aspect, articles employing CVD coatings deposited at low temperatures are
described herein. Briefly, a coated article described herein comprises a substrate and a …

Oxidation behaviors of carbon fiber reinforced SiC matrix composites (C/SiC) are one of the
most noteworthy properties. For C/SiC, the oxidation behavior was controlled by matrix …

This review paper covers a topic of significant importance in micro-and nano-systems
development and manufacturing, specifically the residual stresses in deposited thin-film …

The techniques of micromachining silicon are used for the manufacture of an anemometer
with low electric consumption and great sensitivity. To reduce the energy consumption, a …

We present a comprehensive study of dispersion-engineered nanowire photonic crystal
waveguides suitable for experiments in quantum optics and atomic physics with optically …

A novel maskless fabrication method for highly flexible Cu random network transparent
conductor has been developed by random nanocrack generation and subsequent Cu …

The techniques of micromachining silicon are used for the manufacturing of a thermal
accelerometer. This sensor requires no solid proof mass and has a low cost production. A …

This paper presents the design of a silicon micromechanical resonator with capacitive
transduction for a gas sensor based on photoacoustic spectroscopy. It overcomes problems …