The recent progress of MEMS/NEMS resonators

L Wei, X Kuai, Y Bao, J Wei, L Yang, P Song, M Zhang… - Micromachines, 2021 - mdpi.com
MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and
quantum coupling. This paper reviews the latest research progress of MEMS/NEMS …

Mechanical quantum sensing in the search for dark matter

D Carney, G Krnjaic, DC Moore… - Quantum Science …, 2021 - iopscience.iop.org
Numerous astrophysical and cosmological observations are best explained by the existence
of dark matter, a mass density which interacts only very weakly with visible, baryonic matter …

[書籍][B] Fundamentals of nanomechanical resonators

S Schmid, LG Villanueva, ML Roukes - 2016 - Springer
Back in December 1959, future Nobel laureate Richard Feynman gave a visionary and now
oft-quoted talk entitled “There's Plenty of Room at the Bottom.” The occasion was an …

Searching for vector dark matter with an optomechanical accelerometer

J Manley, MD Chowdhury, D Grin, S Singh, DJ Wilson - Physical review letters, 2021 - APS
We consider using optomechanical accelerometers as resonant detectors for ultralight dark
matter. As a concrete example, we describe a detector based on a silicon nitride membrane …

Radiative heat transfer in freestanding silicon nitride membranes

C Zhang, M Giroux, TA Nour, R St-Gelais - Physical Review Applied, 2020 - APS
Freestanding silicon nitride (Si N) mechanical resonators are of central interest in
applications such as temperature and mass sensing, and for fundamental optomechanical …

[HTML][HTML] Squeeze film absolute pressure sensors with sub-millipascal sensitivity

M Salimi, RV Nielsen, HB Pedersen… - Sensors and Actuators A …, 2024 - Elsevier
We report on the realization of ultrasensitive absolute pressure sensors based on silicon
nitride membrane sandwiches. These sandwiches consist in a pair of highly-pretensioned …

Heat transport in silicon nitride drum resonators and its influence on thermal fluctuation-induced frequency noise

N Snell, C Zhang, G Mu, A Bouchard, R St-Gelais - Physical Review Applied, 2022 - APS
Silicon nitride (Si N) drumhead resonators offer a promising platform for thermal sensing
owing to their high mechanical quality factor and the high temperature sensitivity of their …

Vibrational resonance amplification in a thermo-optic optomechanical nanocavity

G Madiot, S Barbay, R Braive - Nano Letters, 2021 - ACS Publications
Vibrational resonance is a generic phenomenon found in many different bistable systems
whereby a weak low-frequency signal is amplified by use of an additional nonresonant high …

Resolving measurement of large (~ GDa) chemical/biomolecule complexes with multimode nanomechanical resonators

I Stachiv, Z Machů, O Ševeček, O Tuhovcak… - Sensors and Actuators B …, 2022 - Elsevier
Mass sensing by nanomechanical resonators can be routinely performed for analytes of
mass ranging from kDa to tens of MDa. Measurement of the heavier analytes (up to …

Thermal gradients integrated on-chip by passive radiative cooling of silicon nitride nanomechanical resonators

A Bouchard, T Hodges, M Stephan, L Wu… - Applied Thermal …, 2023 - Elsevier
Radiative coupling of objects with outer space, through the atmospheric spectral
transparency window, allows passive cooling below ambient temperature. Such passively …