The assembly of an optical system requires the correction of aberrations in the entire
imaging field by making selected rigid-body motions of the optical elements. We present a …

It is a key issue to measure the point-diffraction wavefront error, which determines the
achievable accuracy of point-diffraction interferometer (PDI). A high-precision method based …

Undulator radiation, generated by relativistic electrons traversing a periodic magnet
structure, can provide a continuously tunable source of very bright and partially coherent …

Researchers using synchrotron radiation fall into two fairly distinct camps: users of the soft x-
ray and vacuum ultraviolet (VUV) region of the spectrum and users of the hard x-ray region …

Precise measurements of the wavefront aberrations of projection optics with 0.1 nm RMS
accuracy are indispensable to develop the extreme ultraviolet (EUV) lithography. In order to …

To obtain high-precision and high-resolution measurement of dynamic wavefront, the
systematic error of the quadriwave lateral shearing interferometer (QWLSI) is analyzed and …

Phase-shifting point-diffraction interferometry at the 193-nm wavelength suitable for highly
accurate measurement of wave-front aberration is introduced. The interferometer preserves …

The capabilities of the EUV 10x microstepper have been substantially improved over the
past year. The key enhancement was the development of a new projection optics system …

The effective coherence of an undulator beamline can be tailored to projection lithography
requirements by using a Simple Single moving element and a simple Stationary low cost …

The extreme ultraviolet (EUV) phase-shifting point diffrac tion interferometer (PS/PDI)
provides the high-accuracy wavefront characterization critical to the development of EUV …