The semiconductor industry continues to produce ever smaller devices that are ever more
complex in shape and contain ever more types of materials. The ultimate sizes and …

Glancing angle deposition (GLAD) is a technique for the fabrication of sculpted micro-and
nanostructures under the conditions of oblique vapor flux incident and limited adatom …

Nanoelectronics is changing the way the world communicates, and is transforming our daily
lives. Continuing Moore's law and miniaturization of low-power semiconductor chips with …

This paper will provide an update to previous works [2][4][9] to our view of the future for in-
line high volume manufacturing (HVM) metrology for the semiconductor industry …

We are develo** a transition edge sensor (TES) microcalorimeter array based on a Ti/Au
superconducting bilayer, as a backup option for the X-IFU instrument on the Athena X-ray …

This paper will provide a high level overview of the future for in-line high volume
manufacturing (HVM) metrology for the semiconductor industry, concentrating on logic …

A comprehensive understanding of the interaction between electron beams and carbon
nanotubes (CNTs) in scanning electron microscope (SEM) can be challenging due to the …

Monte Carlo simulations are frequently used to describe electron–matter interaction in the 0–
50 keV energy range. It often takes hours to simulate electron microscope images using first …

This paper will provide a high level overview of the future for in-line high volume
manufacturing (HVM) metrology for the semiconductor industry. First, we will take a broad …

We report new calculations, which include the influence of the band gap and exciton states,
of the electron inelastic mean free path (IMFP) for liquid water, LiF, CaF2, and Al2O3 from …