MEMS for photonic integrated circuits

C Errando-Herranz, AY Takabayashi… - IEEE Journal of …, 2019 - ieeexplore.ieee.org
The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs)
is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve …

Development of an epitaxial growth technique using iii-v on a si platform for heterogeneous integration of membrane photonic devices on si

T Fujii, T Hiraki, T Aihara, H Nishi, K Takeda, T Sato… - Applied Sciences, 2021 - mdpi.com
Featured Application Optical interconnects for data centers. Abstract The rapid increase in
total transmission capacity within and between data centers requires the construction of low …

Heterogeneous integration of III–V materials by direct wafer bonding for high-performance electronics and optoelectronics

D Caimi, P Tiwari, M Sousa… - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
III-V materials, such as InGaAs and InP, are highly attractive for high-performance
electronics and optoelectronics owning to their high carrier mobilities and potential for …

High-speed CMOS-compatible III-V on Si membrane photodetectors

Y Baumgartner, D Caimi, M Sousa, M Hopstaken… - Optics …, 2020 - opg.optica.org
The monolithic integration of power-efficient optoelectronic devices with CMOS circuits is
critical for future on-chip optical communication. In such platforms, ultra-high-speed …

InP membrane on silicon (IMOS) photonics

JJGM van der Tol, Y Jiao… - IEEE Journal of …, 2019 - ieeexplore.ieee.org
InP membranes have appeared in the last decade as a viable integrated photonics platform,
suitable for adding photonic functions to silicon electronics. It combines the strengths of …

Comparison of AlGaInAs-Based Laser Behavior Grown on Hybrid InP-SiO₂/Si and InP Substrates

C Besancon, G Cerulo, D Néel… - IEEE Photonics …, 2020 - ieeexplore.ieee.org
In this work, we present the fabrication process of a 3~μm-thick AlGaInAs-based vertical pin
laser diode structure grown on a directly bonded InP-SiO2/Si (InPoSi) substrate. High-quality …

Novel CMOS-compatible ultralow capacitance hybrid III-V/Si photodetectors tested up to 32 Gbps NRZ

Y Baumgartner, M Seifried, C Caër, P Stark… - Optical Fiber …, 2019 - opg.optica.org
Novel CMOS-Compatible Ultralow Capacitance Hybrid III-V/Si Photodetectors Tested up to 32
Gbps NRZ Page 1 Th3B.3.pdf OFC 2019 © OSA 2019 Novel CMOS-Compatible Ultralow …

InAs triangular quantum wells grown on InP/SiO2/Si heterogeneous substrate for mid-infrared emission

Z Jiao, W Huang, B Liu, J Lin, T You, S Wang… - Materials Science in …, 2021 - Elsevier
Abstract The properties of InAs/In 0.53 Ga 0.37 As triangular quantum wells (QWs) grown on
an InP/SiO 2/Si integrated substrate by ion-slicing technology are investigated. The material …

Kinetic study of hydrogen lateral diffusion at high temperature in a directly-bonded InP-SiO2/Si substrate

C Besancon, F Fournel, L Sanchez, N Vaissiere… - …, 2020 - iopscience.iop.org
Hybrid integration of III–V materials onto silicon by direct bonding technique is a mature and
promising approaches to develop advanced photonic integrated devices into the silicon …

AlGaInAs MQW Laser Regrowth on Heterogenerous InP-on-SOI: Performance for Different Silicon Cavity Designs

C Besancon, D Néel, J Ramirez, D Bitauld… - Optical Fiber …, 2021 - opg.optica.org
AlGaInAs MQW Laser Regrowth on Heterogenerous InP- on-SOI : Performance for Different
Silicon Cavity Designs Page 1 1 AlGaInAs MQW Laser Regrowth on Heterogenerous InPon-SOI …