[HTML][HTML] Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications
Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN)
have found a broad range of lab-on-chip applications such as biosensing, particle/cell …
have found a broad range of lab-on-chip applications such as biosensing, particle/cell …
Aluminium nitride integrated photonics: a review
Integrated photonics based on silicon has drawn a lot of interests, since it is able to provide
compact solution for functional devices, and its fabrication process is compatible with the …
compact solution for functional devices, and its fabrication process is compatible with the …
Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications
With the increasing requirements for microelectromechanical systems (MEMS) regarding
stability, miniaturization and integration, novel materials such as wide band gap …
stability, miniaturization and integration, novel materials such as wide band gap …
Ultra-wideband integrated photonic devices on silicon platform: from visible to mid-IR
Silicon photonics has gained great success mainly due to the promise of realizing compact
devices in high volume through the low-cost foundry model. It is burgeoning from laboratory …
devices in high volume through the low-cost foundry model. It is burgeoning from laboratory …
Identifying and overcoming the interface originating c-axis instability in highly Sc enhanced AlN for piezoelectric micro-electromechanical systems
Enhancing the piezoelectric activity of AlN by partially substituting Al with Sc to form Al 1–x
Sc x N is a promising approach to improve the performance of piezoelectric micro …
Sc x N is a promising approach to improve the performance of piezoelectric micro …
Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview
The use of wide bandgap semiconductor thin films as sensing materials for micro-electrical–
mechanical systems (MEMS) sensors has been the subject of much discussion in the …
mechanical systems (MEMS) sensors has been the subject of much discussion in the …
Do** effects on the ferroelectric properties of wurtzite nitrides
Z Liu, X Wang, X Ma, Y Yang, D Wu - Applied Physics Letters, 2023 - pubs.aip.org
Ferroelectric materials have been explored for a long time for easy integration with state-of-
the-art semiconductor technologies. Doped wurtzite nitrides have been reported as …
the-art semiconductor technologies. Doped wurtzite nitrides have been reported as …
Flexible-CMOS and biocompatible piezoelectric AlN material for MEMS applications
The development of a CMOS compatible flexible piezoelectric material is desired for
numerous applications and in particular for biomedical MEMS devices. Aluminum nitride …
numerous applications and in particular for biomedical MEMS devices. Aluminum nitride …
Influence of sputtering parameters on structures and residual stress of AlN films deposited by DC reactive magnetron sputtering at room temperature
HY Liu, GS Tang, F Zeng, F Pan - Journal of crystal growth, 2013 - Elsevier
A series of AlN films were deposited on (100) silicon substrate at room temperature with
varying deposition conditions, ie, nitrogen concentration in sputtering gases (N2/(N2+ Ar)) …
varying deposition conditions, ie, nitrogen concentration in sputtering gases (N2/(N2+ Ar)) …
Surface morphology and microstructure of pulsed DC magnetron sputtered piezoelectric AlN and AlScN thin films
Reactive pulsed DC magnetron co‐sputtering is used to grow piezoelectric aluminum nitride
(AlN) and aluminum scandium nitride (AlScN) thin films on Si (001) substrates. By using …
(AlN) and aluminum scandium nitride (AlScN) thin films on Si (001) substrates. By using …