Recent developments in TiO2 as n- and p-type transparent semiconductors: synthesis, modification, properties, and energy-related applications

VC Anitha, AN Banerjee, SW Joo - Journal of materials science, 2015 - Springer
TiO 2-based thin films and nanomaterials have been fabricated via physical and solution-
based techniques by various research groups around the globe. Generally, most …

Recent progress in thin film processing by magnetron sputtering with plasma diagnostics

JG Han - Journal of Physics D: Applied Physics, 2009 - iopscience.iop.org
The precise control of the structure and related properties becomes crucial for sophisticated
applications of thin films deposited by magnetron sputtering in emerging industries including …

Photoelectrochemical study of nanostructured ZnO thin films for hydrogen generation from water splitting

A Wolcott, WA Smith, TR Kuykendall… - Advanced Functional …, 2009 - Wiley Online Library
Photoelectrochemical cells based on traditional and nanostructured ZnO thin films are
investigated for hydrogen generation from water splitting. The ZnO thin films are fabricated …

Room temperature growth of nanocrystalline anatase TiO2 thin films by dc magnetron sputtering

P Singh, D Kaur - Physica B: Condensed Matter, 2010 - Elsevier
We report, the structural and optical properties of nanocrystalline anatase TiO2 thin films
grown on glass substrate by dc magnetron sputtering at room temperature. The influence of …

Influence of O2 partial pressure on the growth of nanostructured anatase phase TiO2 thin films prepared by DC reactive magnetron sputtering

S Sério, MEM Jorge, MJP Maneira, Y Nunes - Materials Chemistry and …, 2011 - Elsevier
Nanostructured titanium dioxide (TiO2) thin films were deposited on unheated glass
substrates by DC reactive magnetron sputtering. The influence of the oxygen percentage in …

Hot target magnetron sputtering process: Effect of infrared radiation on the deposition of titanium and titanium oxide thin films

R Graillot-Vuillecot, AL Thomann, T Lecas… - Vacuum, 2020 - Elsevier
Titanium-based thin films are synthesized by the magnetron sputtering of a titanium target in
pure argon or in a mixture of argon and oxygen (reactive regime) in three experimental …

[HTML][HTML] Crystalline nano-coatings of fluorine-substituted hydroxyapatite produced by magnetron sputtering with high plasma confinement

EO López, AL Rossi, BS Archanjo, RO Ospina… - Surface and Coatings …, 2015 - Elsevier
A radio-frequency magnetron sputtering technique operating in right-angle geometry
(RAMS) with high plasma confinement was revised to produce thin films (15–570 nm) of …

Properties of Ti-oxide thin films grown in reactive magnetron sputtering with self-heating target

R Graillot-Vuillecot, AL Thomann, T Lecas… - Vacuum, 2022 - Elsevier
Titanium dioxide thin films have been synthetized by magnetron sputtering in two
configurations: using a classical cooled target (cold configuration) or allowing the target …

Role of energy in low-temperature high-rate formation of hydrophilic TiO2 thin films using pulsed magnetron sputtering

J Musil, J Šícha, D Heřman, R Čerstvý - Journal of Vacuum Science & …, 2007 - pubs.aip.org
The article reports on low-temperature high-rate deposition of hydrophilic Ti O 2 thin films
using dc pulse dual magnetron (DM) sputtering in an Ar+ O 2 mixture on unheated glass …

Formation of TiOx films produced by high-power pulsed magnetron sputtering

V Straňák, M Quaas, H Wulff, Z Hubička… - Journal of Physics D …, 2008 - iopscience.iop.org
Formation of thin TiO x films produced by pulsed planar magnetron sputtering deposition is
reported in this paper. The formation process and layer growth were controlled by (i) the …