Controllable Si micro-structuring by temporally modulated single-shot femtosecond pulse lithography

Y Liu, J Huang, Y Ye, M Liang, Z Dai, J Zhang… - Applied Physics …, 2024 - pubs.aip.org
Micro-structured silicon surface plays a significant role in the electronics industry. Crystalline
and amorphous phases of silicon, which have significantly different physical properties, can …

Investigation of the modification intensity and distribution in silica glass via ultrafast laser direct writing

Y Ye, S Dong, Y Liu, R Li, M **ao, X Yu, F Tian - Applied Optics, 2025 - opg.optica.org
In ultrafast laser processing of silica glass, the laser-affected zone and heat accumulation of
the ultrafast laser influence the modified intensity and distribution within the materials …