Physics and technology of magnetron sputtering discharges

JT Gudmundsson - Plasma Sources Science and Technology, 2020 - iopscience.iop.org
Magnetron sputtering deposition has become the most widely used technique for deposition
of both metallic and compound thin films and is utilized in numerous industrial applications …

Surface engineering of pure magnesium in medical implant applications

M Gong, X Yang, Z Li, A Yu, Y Liu, H Guo, W Li, S Xu… - Heliyon, 2024 - cell.com
This review comprehensively surveys the latest advancements in surface modification of
pure magnesium (Mg) in recent years, with a focus on various cost-effective procedures …

Mechanical properties of homogeneous and nitrogen graded TiN thin films

FC Silva, MA Tunes, JC Sagás, LC Fontana… - Thin solid films, 2020 - Elsevier
Coating of metallic industrial parts with titanium nitride (TiN) is widely used with the aim to
improve the mechanical and tribological properties of these parts. In the present work, TiN …

Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films

FC da Silva, MA Tunes, PD Edmondson, NB Lima… - SN applied …, 2020 - Springer
Abstract Titanium Nitride (TiN) films were obtained using the grid-assisted magnetron
sputtering deposition technique on Al substrates in two conditions: under constant and …

Stable production of TiOx nanoparticles with narrow size distribution by reactive pulsed dc magnetron sputtering

AM Ahadi, O Polonskyi, U Schürmann… - Journal of Physics D …, 2014 - iopscience.iop.org
The pulsed dc magnetron technique was used for generating TiO x nanoparticles by
sputtering from a titanium target in a gas aggregation source. It was observed that the …

Alternative anode geometry for magnetron sputtering

KA Petroski, JC Sagás - Vacuum, 2020 - Elsevier
Anode geometry can play a crucial role in magnetron sputtering deposition. In this work, we
investigated the use of five different ring anodes placed in front of the target. Their effects in …

Langmuir probe measurements in a grid-assisted magnetron sputtering system

JC Sagás, RS Pessoa, HS Maciel - Brazilian Journal of Physics, 2018 - Springer
The grid-assisted magnetron sputtering is a variation of the magnetron sputtering commonly
used for thin film deposition. In this work, Langmuir probe measurements were performed in …

Growth and properties of Functionally graded ceramic coatings deposited by grid-assisted magnetron sputtering

FC Silva, JC Sagás, LC Fontana, JMC Miscione… - Advanced Ceramic …, 2023 - Elsevier
Many failure modes in engineering applications (such as corrosion and wear) are related to
surface performance and can be avoided or minimized by proper material selection. The …

Unusual behaviour of current–voltage relations in an unbalanced grid-assisted magnetron sputtering system

JC Sagás, DA Duarte, LC Fontana - Journal of Physics D: Applied …, 2012 - iopscience.iop.org
Current–voltage relations were measured in an unbalanced grid-assisted magnetron
sputtering system at different inter-electrode distances and magnetic field configurations …