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Physics and technology of magnetron sputtering discharges
JT Gudmundsson - Plasma Sources Science and Technology, 2020 - iopscience.iop.org
Magnetron sputtering deposition has become the most widely used technique for deposition
of both metallic and compound thin films and is utilized in numerous industrial applications …
of both metallic and compound thin films and is utilized in numerous industrial applications …
Surface engineering of pure magnesium in medical implant applications
M Gong, X Yang, Z Li, A Yu, Y Liu, H Guo, W Li, S Xu… - Heliyon, 2024 - cell.com
This review comprehensively surveys the latest advancements in surface modification of
pure magnesium (Mg) in recent years, with a focus on various cost-effective procedures …
pure magnesium (Mg) in recent years, with a focus on various cost-effective procedures …
Mechanical properties of homogeneous and nitrogen graded TiN thin films
Coating of metallic industrial parts with titanium nitride (TiN) is widely used with the aim to
improve the mechanical and tribological properties of these parts. In the present work, TiN …
improve the mechanical and tribological properties of these parts. In the present work, TiN …
Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films
Abstract Titanium Nitride (TiN) films were obtained using the grid-assisted magnetron
sputtering deposition technique on Al substrates in two conditions: under constant and …
sputtering deposition technique on Al substrates in two conditions: under constant and …
Stable production of TiOx nanoparticles with narrow size distribution by reactive pulsed dc magnetron sputtering
The pulsed dc magnetron technique was used for generating TiO x nanoparticles by
sputtering from a titanium target in a gas aggregation source. It was observed that the …
sputtering from a titanium target in a gas aggregation source. It was observed that the …
Alternative anode geometry for magnetron sputtering
KA Petroski, JC Sagás - Vacuum, 2020 - Elsevier
Anode geometry can play a crucial role in magnetron sputtering deposition. In this work, we
investigated the use of five different ring anodes placed in front of the target. Their effects in …
investigated the use of five different ring anodes placed in front of the target. Their effects in …
Performance of Mg target for neutron generator under deuterium ion irradiation
S Zhang, S Chen, D ** power. The neutron yield can be improved if Mg is used …
Langmuir probe measurements in a grid-assisted magnetron sputtering system
The grid-assisted magnetron sputtering is a variation of the magnetron sputtering commonly
used for thin film deposition. In this work, Langmuir probe measurements were performed in …
used for thin film deposition. In this work, Langmuir probe measurements were performed in …
Growth and properties of Functionally graded ceramic coatings deposited by grid-assisted magnetron sputtering
Many failure modes in engineering applications (such as corrosion and wear) are related to
surface performance and can be avoided or minimized by proper material selection. The …
surface performance and can be avoided or minimized by proper material selection. The …
Unusual behaviour of current–voltage relations in an unbalanced grid-assisted magnetron sputtering system
Current–voltage relations were measured in an unbalanced grid-assisted magnetron
sputtering system at different inter-electrode distances and magnetic field configurations …
sputtering system at different inter-electrode distances and magnetic field configurations …