Where conventional testing and inspection techniques fail at the micro-scale, optical
techniques provide a fast, robust, and relatively inexpensive alternative for investigating the …

This paper presents a simple method for fabricating SU8 three dimensional (3D) prisms with
very small inclined-angles for optical-fiber/planar-waveguide interconnection with low …

In this chapter, we demonstrate a low-cost and multifunctional interferometric platform based
on a Twyman–Green interferometer (TGI) for testing microelectromechanical systems …

The technology and performance of micromachined channel waveguides, based on plasma-
enhanced chemical vapour deposition (PECVD) of silicon oxynitride thin films, are …

There is a great need for techniques that will permit the evaluation of the micromechanical
state of micro-electro-mechanical system (MEMS) devices, at all steps of manufacturing, with …

Silicon micromachining benefits from the small scale and the facility of integration with
electronic circuits and sensors resulting in production of miniaturized and smart …

Integrated optic interferometric systems have been developed since many years and most of
them are connected with telecommunication. In case of our group research profile we are …

There is a great need for techniques that will permit the evaluation of MEMS devices, in all
stages of manufacturing, with respect to material and micromechanical properties. In this …

Fabrication of three-dimensional (3D) SU-8 (an epoxy-based negative photoresist from
MicroChem) prisms as low-loss couplers for interconnection between optical components …

This paper presents optimized structural interface between 3D SU8 prism and SOI
waveguide for reduced coupling loss at the interface, hence increasing light transmission …