Micromechanical cantilever sensors are attracting a lot of attention because of the need for
characterizing, detecting, and monitoring chemical and physical properties, as well as …

Wide-range humidity sensing and monitoring applications including instrumentation,
agriculture, meteorology, biomedicine, and food processing have attracted long-standing …

Conductive hydrogels have attracted attention because of their wide application in wearable
devices. However, it is still a challenge to achieve conductive hydrogels with high sensitivity …

The asymmetric resonance response in electro-thermal piezoresistive cantilever resonators
causes a need of an optimization treatment for taking parasitic actuation-sensing effects into …

ZnO nanorods (NRs) arrays with good vertical alignment were selectively grown on
microscale patterned surfaces by a MEMS-compatible, low-temperature chemical-bath …

Resonance-based sensors ordinarily show a symmetrical amplitude shape, which is
accompanied by a monotonic transition as its phase response. At its resonance state, there …

The asymmetric resonance response in thermally actuated piezoresistive cantilever sensors
causes a need for optimization, taking parasitic actuation–sensing effects into account. In …

This paper reports a piezoresistive silicon microcantilever-based gravimetric humidity
sensor, where a ZnO nanofilm (200 nm) and ZnO nanorods (NRs) with different lengths (1.5 …

Resonant mass sensors have been studied and developed for many years. However, their
application as a portable testing platform is limited due to a need for external bulky optical …

This paper reports a self-actuating and self-sensing gravimetric ethanol sensor, based on
3D ZnO-Nanorods@ Si-Nanopillars (ZnO-NRs@ Si-NPLs) as the sensing material which, for …