Sensing techniques and interrogation methods in optical MEMS accelerometers: A review
In this article, we review optical MEMS accelerometers with a particular focus on sensing
techniques and interrogation methods. Optical accelerometers find use in various …
techniques and interrogation methods. Optical accelerometers find use in various …
Optical interferometric MEMS accelerometers
M Zhao, Y Qi, H Wang, Z **e, B Li… - Laser & Photonics …, 2024 - Wiley Online Library
Laser interferometry is one of the most accurate measurement technologies whose
displacement resolution can reach the femtometer (fm) level. With the development of Micro …
displacement resolution can reach the femtometer (fm) level. With the development of Micro …
A MEMS based Fabry–Pérot accelerometer with high resolution
M Zhao, K Jiang, H Bai, H Wang, X Wei - Microsystem Technologies, 2020 - Springer
Optical MEMS has become exceedingly popular because of its high performance and
resistance to electromagnetic interference. A MEMS based Fabry–Pérot accelerometer …
resistance to electromagnetic interference. A MEMS based Fabry–Pérot accelerometer …
Nano-g accelerometer with differential Fabry–Pérot interferometer for low-frequency noise suppression
H Ouyang, Z Qu, H Liu, C Hu, S Yan, Y Wang… - Sensors and Actuators A …, 2022 - Elsevier
This paper introduces a nano-g level optical accelerometer based on a differential Fabry–
Pérot interferometer (DFPI) for low-frequency (less than 1 Hz) noise suppression. The …
Pérot interferometer (DFPI) for low-frequency (less than 1 Hz) noise suppression. The …
Design and fabrication of a differential MOEMS accelerometer based on Fabry–Pérot micro-cavities
In this paper, a differential micro-opto-electro-mechanical system (MOEMS) accelerometer
based on the Fabry-Pérot (FP) micro-cavities is presented. The optical system of the device …
based on the Fabry-Pérot (FP) micro-cavities is presented. The optical system of the device …
Closed-loop MOEMS accelerometer
In this paper, a closed-loop micro-opto-electro-mechanical system (MOEMS) accelerometer
based on the Fabry-Pérot (FP) interferometer is presented. The FP cavity is formed between …
based on the Fabry-Pérot (FP) interferometer is presented. The FP cavity is formed between …
Coarse-to-fine optical MEMS accelerometer design and simulation
A coarse-to-fine optical microelectromechanical systems (MEMS) accelerometer based on
the Fabry–Pérot (FP) interferometer is proposed. The mechanical structure consists of a …
the Fabry–Pérot (FP) interferometer is proposed. The mechanical structure consists of a …
An optical measuring transducer for a micro-opto-electro-mechanical micro-g accelerometer based on the optical tunneling effect
E Barbin, T Nesterenko, A Koleda, E Shesterikov… - Micromachines, 2023 - mdpi.com
Micro-opto-electro-mechanical (MOEM) accelerometers that can measure small
accelerations are attracting growing attention thanks to their considerable advantages …
accelerations are attracting growing attention thanks to their considerable advantages …
Highly sensitive micro-opto-electromechanical systems accelerometer based on MIM waveguide wavelength modulation
X Yang, D **a, J Li, Q Chu - IEEE Sensors Journal, 2022 - ieeexplore.ieee.org
In this article, a novel micro-opto-electro-mechanical system (MOEMS) accelerometer
sensor based on metal–insulator–metal (MIM) waveguide wavelength modulation is …
sensor based on metal–insulator–metal (MIM) waveguide wavelength modulation is …
A high-sensitivity optical MEMS accelerometer based on SOI double-side micromachining
Z Qu, H Liu, H Ouyang, C Hu, LC Tu - 2020 IEEE SENSORS, 2020 - ieeexplore.ieee.org
High-sensitivity micro-electromechanical systems (MEMS) accelerometers have been widely
used in many applications. Although the optical MEMS accelerometers have the advantage …
used in many applications. Although the optical MEMS accelerometers have the advantage …