Recent advances in sequential infiltration synthesis (SIS) of block copolymers (BCPs)
In the continuous downscaling of device features, the microelectronics industry is facing the
intrinsic limits of conventional lithographic techniques. The development of new synthetic …
intrinsic limits of conventional lithographic techniques. The development of new synthetic …
The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective
Sequential infiltration synthesis (SIS) is an emerging materials growth method by which
inorganic metal oxides are nucleated and grown within the free volume of polymers in …
inorganic metal oxides are nucleated and grown within the free volume of polymers in …
Reaction–diffusion transport model to predict precursor uptake and spatial distribution in vapor-phase infiltration processes
Vapor-phase infiltration (VPI) has emerged as a scalable process for transforming polymer
products into a variety of organic–inorganic hybrid materials with potential applications to a …
products into a variety of organic–inorganic hybrid materials with potential applications to a …
Sequential infiltration synthesis of electronic materials: group 13 oxides via metal alkyl precursors
The sequential infiltration synthesis (SIS) of group 13 indium and gallium oxides (In2O3 and
Ga2O3) into poly (methyl methacrylate)(PMMA) thin films is demonstrated using …
Ga2O3) into poly (methyl methacrylate)(PMMA) thin films is demonstrated using …
Advancing next generation nanolithography with infiltration synthesis of hybrid nanocomposite resists
Organic–inorganic hybrid resists are emerging as an effective way of addressing stringent
process requirements for aggressive down-scaling of semiconducting devices. However …
process requirements for aggressive down-scaling of semiconducting devices. However …
Sequential Infiltration Synthesis of Al2O3 in PMMA Thin Films: Temperature Investigation by Operando Spectroscopic Ellipsometry
Sequential infiltration synthesis (SIS) is a scalable and valuable technique for the synthesis
of organic–inorganic materials with several potential applications at the industrial level …
of organic–inorganic materials with several potential applications at the industrial level …
Nano Spray‐Dried Block Copolymer Nanoparticles and Their Transformation into Hybrid and Inorganic Nanoparticles
A novel combination of block copolymer (BCP) nano spray‐drying (NSD), solvent annealing,
and selective metal oxide growth is utilized to create functional polymer nanoparticles …
and selective metal oxide growth is utilized to create functional polymer nanoparticles …
Volume compensating materials after vapor phase infiltration: effect of different butyl isomers of polymer side-chains on high process temperature durability
N Sasao, S Sugimura, K Asakawa… - Japanese Journal of …, 2024 - iopscience.iop.org
Vapor phase infiltration is a facile process that adds metallic features to organic polymer
patterns. Generally, volume expansion in typical polymers such as poly (methyl …
patterns. Generally, volume expansion in typical polymers such as poly (methyl …
Metal diffusion model in polymer matrices in vapor phase infiltration
N Sasao, S Sugimura, K Asakawa - Japanese Journal of Applied …, 2021 - iopscience.iop.org
Metal induction into polymers is an emerging technology that could add inorganic
characteristics to organic polymers. The organo-metal precursors dissolve into a polymer …
characteristics to organic polymers. The organo-metal precursors dissolve into a polymer …
Depth profiles of aluminum component in sequential infiltration synthesis-treated electron beam resist films analyzed by time-of-flight secondary ion mass spectrometry
S Ito, Y Ozaki, T Nakamura… - Japanese Journal of …, 2020 - iopscience.iop.org
Sequential infiltration synthesis (SIS) is a promising method for organic–inorganic
hybridization of organic polymer resist films in nanolithography. The understanding of the …
hybridization of organic polymer resist films in nanolithography. The understanding of the …