This review provides a comprehensive survey of noise research in MEMS. Some
background on noise and on MEMS is provided. We review noise production mechanisms …

In this paper, design, implementation and characterization of a 3-V switched-capacitor (SC)<
formula formulatype=" inline">< tex> ΔΣ</tex></formula> CMOS interface circuit for the …

This paper presents a robust fabrication technique for manufacturing ultrasensitive
micromechanical capacitive accelerometers in thick silicon-on-insulator substrates. The …

In this paper, we review the high-resolution, micromachined accelerometers by enunciating
the development of their mechanical components, the electronic circuitry and the …

This review explores the current state and future prospects of tactile sensing technologies in
space robotics, addressing the unique challenges posed by harsh space environments such …

In this paper, a mechanical amplification concept for microelectromechanical systems
(MEMS) physical sensors is proposed with the aim to improve their sensitivity. The scheme …

Surface micro-machined z-axis capacitive accelerometers were designed and fabricated on
a flexible polyimide substrate, conformal down to 2 cm radius of curvature with the stresses …

Abstract System development and characterization of a low noise low offset SOI MEMS–
CMOS PCB-integrated multi-chip±4g piezoresistive accelerometer sensor comprising a …

This paper presents a method to enhance both the sensitivity and bandwidth of in-plane
capacitive micromachined accelerometers by using compliant mechanical amplifiers, and …

This paper reports on the design, implementation and characterization of triaxial capacitive
accelerometers operating in a low-pressure environment (~ 1 Torr). Small form-factor …