Inline metrology of high aspect ratio hole tilt and center line shift using small-angle x-ray scattering
P Gin, M Wormington, Y Amasay… - Journal of Micro …, 2023 - spiedigitallibrary.org
High aspect ratio (HAR) structures found in three-dimensional nand memory structures have
unique process control challenges. The etch used to fabricate channel holes several …
unique process control challenges. The etch used to fabricate channel holes several …
[HTML][HTML] Complex profile metrology via physical symmetry enhanced small angle x-ray scattering
Small angle x-ray scattering (SAXS) stands out as a promising solution in semiconductor
metrology. The critical issue of SAXS metrology is to solve the SAXS inverse problem. With …
metrology. The critical issue of SAXS metrology is to solve the SAXS inverse problem. With …
X-ray-based overlay metrology using reciprocal space slicing analysis
Overlay serves as the pivotal performance indicator for lithography tools, and its prompt and
precise measurement significantly underpins the process yield control. At present, diffraction …
precise measurement significantly underpins the process yield control. At present, diffraction …
X-ray scattering critical dimensional metrology using a compact x-ray source for next generation semiconductor devices
Semiconductor devices continue to shrink in size with every generation. These ever smaller
structures are challenging the resolution limits of current analytical and inline metrology …
structures are challenging the resolution limits of current analytical and inline metrology …
Estimation of line cross sections using critical-dimension grazing-incidence small-angle x-ray scattering
The semiconductor industry is continuously pushing the limits of photolithography, with
feature sizes now smaller than 10 nm. To ensure quality, it has become necessary to look …
feature sizes now smaller than 10 nm. To ensure quality, it has become necessary to look …
[HTML][HTML] Uncertainty quantification on small angle x-ray scattering measurement using Bayesian deep learning
Small angle x-ray scattering (SAXS) is a widely recognized solution for measuring complex
nanostructures. With the increasing demand for accurately assessing structural …
nanostructures. With the increasing demand for accurately assessing structural …
Characterizing patterned block copolymer thin films with soft x-rays
The directed self-assembly (DSA) of block copolymers (BCPs) is a potential solution for
patterning critical features for integrated circuits at future technology nodes. For this process …
patterning critical features for integrated circuits at future technology nodes. For this process …