Sensor stability is defined as the ability to maintain a relatively stable and repeatable signal
over a sufficient period. Long-term stability for gas sensors is an essential capability for …

With the growing demand for gas monitoring in various fields as the fast development of the
internet of things, metal oxide semiconductors (MOSs) gas sensors based on the advanced …

In this work we present a methodology for the localized growth of nanowires on prespecified
areas of microhotplates that allows to independently adjust the device's resistance and its …

This study develops a MEMS-based formaldehyde gas sensor based on a suspended
silicon nitride microstructure with an integrated micro Pt heater, a thin-film NiO sensing layer …

Micromachined silicon platforms, owing to some of its inherent advantages including
miniaturized dimensions, ultralow power consumption, reduced batch fabrication cost, long …

Undoped nanocrystalline n-ZnO thin films were deposited on SiO2-coated p-Si substrates by
sol–gel technique to fabricate ZnO-based resistive sensors for methane detection. The …

Recent development of laser-induced hydrothermal growth enabled direct digital growth of
ZnO nanowire array at an arbitrary position even on 3D structures by creating a localized …

Self-heating operation, or the use of the resistance-probing signal to warm up and control
the temperature of nanowire devices, has been the subject of research for more than a …

Nanocrystalline ZnO based sensor using micromachined silicon substrate has been
reported for efficient detection of methane as opposed to conventional SnO2 based …

Micro-hotplates consisting of a platinum-based heating element embedded in two low-stress
silicon nitride layers were fabricated. In this communication, we report on the composition of …