The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known
technology for label-free sensing which holds promise as a technique for cheap, portable …

Since the late 1980s there have been spectacular developments in micromechanical or
microelectro-mechanical (MEMS) systems which have enabled the exploration of …

Piezoresistive sensors are among the earliest micromachined silicon devices. The need for
smaller, less expensive, higher performance sensors helped drive early micromachining …

We present a chemical sensor based on a microfabricated array of eight silicon cantilevers
actuated at their resonance-frequency and functionalized by polymer coatings. The …

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SpringerLink Log in Menu Find a journal Publish with us Search Cart 1.Home 2.Analytical …

Selective and sensitive detection of explosives is very important in countering terrorist
threats. Detecting trace explosives has become a very complex and expensive endeavor …

The sensing behavior of polymer-coated resonant cantilevers for mass-sensitive detection of
volatile organic compounds was investigated. Industrial complementary metal oxide …

We report an electro-mechanical biosensor for electrical detection of proteins with disease
markers using self-sensing piezoresistive micro-cantilevers. Electrical detection, via surface …

Biosensors are sensors in which biomolecular interactions are used as sensing reactions.
Biomolecular interactions, when combined with a microcantilever platform, can produce an …

Microfabrication processes for chemical and biochemical sensors are reviewed. Standard
processing steps originating from semiconductor technology are detailed, and specific …