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Piezo-actuated smart mechatronic systems: Nonlinear modeling, identification, and control
Z Yuan, S Zhou, Z Zhang, Z **ao, C Hong… - … Systems and Signal …, 2024 - Elsevier
Precise actuation is a widely utilized technology in the realm of high-end equipment.
Piezoelectric actuators (PEAs) stand out due to their exceptional attributes, including high …
Piezoelectric actuators (PEAs) stand out due to their exceptional attributes, including high …
High-speed atomic force microscopy in ultra-precision surface machining and measurement: challenges, solutions and opportunities
The atomic force microscope (AFM) possesses a unique capability for three-dimensional,
high-resolution imaging down to the atomic level. It operates without the needs of additional …
high-resolution imaging down to the atomic level. It operates without the needs of additional …
Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey
High-bandwidth nano-positioning stages (NPSs) have boosted the advancement of modern
ultra-precise, ultra-fast measurement and manufacturing technologies owing to their fast …
ultra-precise, ultra-fast measurement and manufacturing technologies owing to their fast …
Optimal Design of Smoothed Raster Scan Trajectory for Repetitive Control Based High-Speed Atomic Force Microscopy Imaging
Due to the uniform sampling pattern and concise trajectory generation, the raster scan has
become the mainstream scan mode for atomic force microscopes (AFMs). However, the high …
become the mainstream scan mode for atomic force microscopes (AFMs). However, the high …
[CITATION][C] Recent Advances in Compliant Precision Positioning and Manipulating Mechanisms
张宪民， 朱本亮， **海， 陈忠， 王日鑫， 臧浩延 - Journal of Mechanical Engineering, 2023
[CITATION][C] 柔顺精密定位与操作机构研究进展
张宪民， 朱本亮， **海， 陈忠， 王日鑫， 臧浩延 - 机械工程学报, 2023 - **机械工程学会