We consider an electrostatically actuated torsional micromirror, a key element of recent
optical microdevices. The mechanical response is analyzed with specific emphasis on its …

The main torsional mode of electrostatically actuated micromirrors is known to be dominated
by parametric resonance when the actuation is performed via in-plane comb fingers. Here …

Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro-
Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the …

This paper proposes an efficient nonlinear one-dimensional (1D) compact mass-damper-
spring model to predict the dynamic response of electrostatic resonant micro-electro …

The development of new compliant resonant microsystems and the trend towards further
miniaturization have recently raised the issue of the accuracy and reliability of computational …

Miniaturization of sound localization sensors arrays is heavily constrained by the limited
directional cues in intensity difference and phase difference available at the microscale …

The main torsional mode of electrostatically in-plane actuated micromirrors is known to be
driven by parametric resonance. Here we show that also a spurious yaw mode is activated …

Abstract Microelectro Mechanical Systems (MEMS) technology has revolutionized many
industrial and consumer products by combining silicon-based microelectronics with …