Principles of plasma discharges and materials processing

MA Lieberman, AJ Lichtenberg - MRS Bulletin, 1994 - cambridge.org
The authors have done an excellent job of clearly explaining the different nomenclature
used in plasma processing, with the meaning of the symbols and constants commonly …

Photodetachment diagnostic techniques for measuring negative ion densities and temperatures in plasmas

M Bacal - Review of Scientific Instruments, 2000 - pubs.aip.org
Photodetachment diagnostic techniques can help determine densities and temperatures of
negative ions in a variety of scientific devices in which these ions are one of the major …

EUV-induced plasma: A peculiar phenomenon of a modern lithographic technology

J Beckers, T van de Ven, R van der Horst, D Astakhov… - Applied Sciences, 2019 - mdpi.com
Featured Application This work finds application in Extreme Ultraviolet (EUV) lithography in
general. More specifically, the results may impact the development of EUV optical …

[BOOK][B] An introduction to laboratory space and fusion plasma

A Piel - 2010 - Springer
The enlarged new edition of this textbook provides a comprehensive introduction to the
basic processes in plasmas and demonstrates that the same fundamental concepts describe …

Enhancement of output power density in a modified polytetrafluoroethylene surface using a sequential O2/Ar plasma etching for triboelectric nanogenerator …

T Prada, V Harnchana, A Lakhonchai… - Nano Research, 2022 - Springer
In this work, the surface modification using a two-steps plasma etching has been developed
for enhancing energy conversion performance in polytetrafluoroethylene (PTFE) triboelectric …

Plasma-grafting surface modifications to enhance membrane hydrophobicity for brine membrane distillation

H Giraldo-Mejía, YM Quintero, F Mery, F Rodriguez… - Desalination, 2023 - Elsevier
In this study, a novel approach is presented to significantly enhance hydrophobicity and
performance in direct contact membrane distillation (DCMD) against concentrated reverse …

Electronegativity of low-pressure high-density oxygen discharges

JT Gudmundsson, IG Kouznetsov… - Journal of Physics D …, 2001 - iopscience.iop.org
We use a global (volume averaged) model to study the presence of negative ions and
metastable species in low-pressure high-density oxygen discharges. We find the negative …

Main Species and Physicochemical Processes in Cold Atmospheric‐pressure He + O2 Plasmas

DX Liu, MZ Rong, XH Wang, F Iza… - Plasma Processes …, 2010 - Wiley Online Library
The main species and chemical processes in low‐temperature atmospheric‐pressure He+
O2 plasmas are identified using a comprehensive global model. The simulation results …

Microwave engineering of plasma-assisted CVD reactors for diamond deposition

F Silva, K Hassouni, X Bonnin… - Journal of physics …, 2009 - iopscience.iop.org
The unique properties of CVD diamond make it a compelling choice for high power
electronics. In order to achieve industrial use of CVD diamond, one must simultaneously …

Negative ion sources

M Bacal, M Sasao, M Wada - Journal of Applied Physics, 2021 - pubs.aip.org
In this Tutorial, surface and double charge exchange negative ion sources for producing
negative ion beams of different ion species will be described. The need for negative ions as …