Ferroelectric AlScN thin films with enhanced polarization and low leakage enabled by high-power impulse magnetron sputtering

F Messi, J Patidar, N Rodkey, CW Dräyer… - arxiv preprint arxiv …, 2025 - arxiv.org
The demand for efficient data processing motivates a shift toward in-memory computing
architectures. Ferroelectric materials, particularly AlScN, show great promise for next …