Reactive sputtering of aluminum nitride (002) thin films for piezoelectric applications: A review
We summarize the recipes and describe the role of sputtering parameters in producing
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
Analysis and optimization of sputter deposited AlN-layers for flexural plate wave devices
Aluminum nitride (AlN) thin films deposited by reactive radio frequency magnetron sputtering
in an Ar/N 2 discharge on Si (001) substrates were studied with respect to structure, stress …
in an Ar/N 2 discharge on Si (001) substrates were studied with respect to structure, stress …
Controlled sputtering of AlN (002) and (101) crystal orientations on epitaxial 3C-SiC-on-Si (100) substrate
Abstract Aluminum Nitride (AlN) thin films are successfully deposited on epitaxial 3C-SiC-on-
Si (100) substrates using DC magnetron sputterer. The sputtered films are characterized on …
Si (100) substrates using DC magnetron sputterer. The sputtered films are characterized on …
Sputtering of aluminium nitride (002) film on cubic silicon carbide on silicon (100) substrate: Influences of substrate temperature and deposition power
A Iqbal, G Walker, L Hold, A Fernandes… - Journal of Materials …, 2020 - Springer
We perform pulsed DC sputtering of aluminium nitride (002) thin films on top of cubic silicon
carbide-on-silicon (100) substrates at different substrate temperatures and deposition …
carbide-on-silicon (100) substrates at different substrate temperatures and deposition …
DC sputtering of highly c-axis AlN films on top of 3C-SiC (111)-on-Si (111) substrates under various N2 concentrations
A Iqbal, G Walker, L Hold, A Fernandes… - Journal of Vacuum …, 2017 - pubs.aip.org
This article reports on the direct current sputtering of AlN thin films on top of a cubic-silicon
carbide (111) on silicon (111) substrates. The authors varied the nitrogen (N 2) …
carbide (111) on silicon (111) substrates. The authors varied the nitrogen (N 2) …
[PDF][PDF] AlN-based Electro-Acoustic Sensors for Analytics in Liquids
M Reusch - 2018 - publica-rest.fraunhofer.de
Aufgrund ihrer herausragenden Eigenschaften eignen sich Membranbiegeschwinger (engl.
flexural plate wave, FPW) Sensoren besonders gut als akustische Mikrosensoren zum …
flexural plate wave, FPW) Sensoren besonders gut als akustische Mikrosensoren zum …
Study of HfN as seed layer for next generation of BAW RF filters: synthesis, characterization, and investigation of piezoelectric performance
E Llorens Balada - 2020 - diva-portal.org
Micro-electro-mechanical systems (MEMS) have become an essential component of a wide
range of electronic devices over the last decades such as accelerometers, microphones, gas …
range of electronic devices over the last decades such as accelerometers, microphones, gas …
High Quality Single-Crystalline Aluminum Nitride Grown Using Pulsed Atomic-Layer Epitaxy Technique by MOCVD on Sapphire Substrate
MN Abd Rahman - 2021 - search.proquest.com
The unique structural properties and engineering characteristics of nitride-based materials
have given them a special position in semiconductor applications. Alloys with a tuned …
have given them a special position in semiconductor applications. Alloys with a tuned …
[CITAZIONE][C] AlN-based electro-acoustic sensors for analytics in liquids:: from material development to the device
M Reusch - 2018 - Dissertation, Universität Freiburg …