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Recent progress in multiphoton microfabrication
S Maruo, JT Fourkas - Laser & Photonics Reviews, 2008 - Wiley Online Library
Multiphoton microfabrication enables the production of three‐dimensional microstructures
with sub‐100 nm resolution via direct laser writing using a femtosecond, pulsed laser beam …
with sub‐100 nm resolution via direct laser writing using a femtosecond, pulsed laser beam …
Innovative SU-8 lithography techniques and their applications
JB Lee, KH Choi, K Yoo - Micromachines, 2014 - mdpi.com
SU-8 has been widely used in a variety of applications for creating structures in micro-scale
as well as sub-micron scales for more than 15 years. One of the most common structures …
as well as sub-micron scales for more than 15 years. One of the most common structures …
Low-cost and cleanroom-free fabrication of microneedles
We present a facile, low-cost and cleanroom-free technique for the fabrication of
microneedles using molds created by laser ablation. Microneedle mold with high aspect …
microneedles using molds created by laser ablation. Microneedle mold with high aspect …
[HTML][HTML] SU-8 Photolithography as a Toolbox for Carbon MEMS
R Martinez-Duarte - Micromachines, 2014 - mdpi.com
The use of SU-8 as precursor for glass-like carbon, or glassy carbon, is presented here. SU-
8 carbonizes when subject to high temperature under inert atmosphere. Although epoxy …
8 carbonizes when subject to high temperature under inert atmosphere. Although epoxy …
[PDF][PDF] SU-8 photolithography and its impact on microfluidics
Microfluidics is the science and technology of systems that process or manipulate small
amounts (micro-to picoliters) of fluids, using channels with dimensions of tens to hundreds of …
amounts (micro-to picoliters) of fluids, using channels with dimensions of tens to hundreds of …
[HTML][HTML] Rapid fabrication of hydrogel microstructures using UV-induced projection printing
Fabrication of hydrogel microstructures has attracted considerable attention. A large number
of applications, such as fabricating tissue engineering scaffolds, delivering drugs to …
of applications, such as fabricating tissue engineering scaffolds, delivering drugs to …
Fan-out wafer-level packaging (FOWLP) of large chip with multiple redistribution layers (RDLs)
This study is for fan-out wafer-level packaging with chip-first (die face-up) formation. Chips
with Cu contact-pads on the front side and a die attach film on the backside are picked and …
with Cu contact-pads on the front side and a die attach film on the backside are picked and …
Cost-effective fabrication of chitosan microneedles for transdermal drug delivery
In this paper we present fabrication of hollow and solid chitosan microneedles using a
recently proposed low-cost and cleanroom-free fabrication method called Cross-Over Lines …
recently proposed low-cost and cleanroom-free fabrication method called Cross-Over Lines …
Polarization independent and broadband achromatic metalens in ultraviolet spectrum
M Liu, N Xu, B Wang, W Qian, B Xuan, J Cao - Optics Communications, 2021 - Elsevier
Ultraviolet lenses are core components of surveillance cameras, lithography machines and
UV microscopes. Traditional refractive UV lenses are bulky, expensive and easy to aging …
UV microscopes. Traditional refractive UV lenses are bulky, expensive and easy to aging …
UV lithography and molding fabrication of ultrathick micrometallic structures using a KMPR photoresist
YM Shin, D Gamzina, LR Barnett… - Journal of …, 2010 - ieeexplore.ieee.org
By using a novel negative-tone photoresist, KMPR, we have investigated ultraviolet (UV)
lithographic microelectroforming fabrication of ultrathick metallic microstructures (¿ 400¿ m) …
lithographic microelectroforming fabrication of ultrathick metallic microstructures (¿ 400¿ m) …