Atomic layer deposition of conductive and semiconductive oxides
Conductive and semiconductive oxides constitute a class of materials of which the electrical
conductivity and optical transparency can be modulated through material design (eg, do** …
conductivity and optical transparency can be modulated through material design (eg, do** …
Energy-enhanced atomic layer deposition for more process and precursor versatility
Atomic layer deposition (ALD) is a popular deposition technique comprising two or more
sequential, self-limiting surface reactions, which make up an ALD cycle. Energy-enhanced …
sequential, self-limiting surface reactions, which make up an ALD cycle. Energy-enhanced …
Tin oxide thin film spacers in semiconductor device manufacturing
DC Smith, R Wise, A Mahorowala… - US Patent …, 2017 - Google Patents
Thin tin oxide films are used as spacers in semiconductor device manufacturing. In one
implementation, thin tin oxide film is conformally deposited onto a semiconductor substrate …
implementation, thin tin oxide film is conformally deposited onto a semiconductor substrate …
Outstanding Fill Factor in Inverted Organic Solar Cells with SnO2 by Atomic Layer Deposition
Transport layers are of outmost importance for thin‐film solar cells, determining not only their
efficiency but also their stability. To bring one of these thin‐film technologies toward mass …
efficiency but also their stability. To bring one of these thin‐film technologies toward mass …
Undoped tin dioxide transparent electrodes for efficient and cost-effective indoor organic photovoltaics (SnO2electrode for indoor organic photovoltaics)
Indoor organic photovoltaics (OPVs) are currently being investigated for small-scale energy
generation from artificial light sources to power small electronic devices. Despite recent …
generation from artificial light sources to power small electronic devices. Despite recent …
High-mobility solution-processed tin oxide thin-film transistors with high-κ alumina dielectric working in enhancement mode
G Huang, L Duan, G Dong, D Zhang… - ACS applied materials & …, 2014 - ACS Publications
Solution-processed metal oxide thin-film transistors (TFTs) operating in enhancement mode
are promising for the next-generation flat panel displays. In this work, we report high-mobility …
are promising for the next-generation flat panel displays. In this work, we report high-mobility …
Thermal Atomic Layer Etching of Titanium Nitride Using Sequential, Self-Limiting Reactions: Oxidation to TiO2 and Fluorination to Volatile TiF4
The thermal atomic layer etching (ALE) of TiN was demonstrated using a new etching
mechanism based on sequential, self-limiting oxidation and fluorination reactions. The …
mechanism based on sequential, self-limiting oxidation and fluorination reactions. The …
Tin oxide atomic layer deposition from tetrakis (dimethylamino) tin and water
Due to the abundance and usefulness of tin oxide for applications such as transparent
conductors, sensors, and catalysts, it is desirable to establish high quality atomic layer …
conductors, sensors, and catalysts, it is desirable to establish high quality atomic layer …
Highly robust transparent and conductive gas diffusion barriers based on tin oxide
A Behrendt, C Friedenberger, T Gahlmann… - Advanced …, 2015 - Wiley Online Library
In this work, we will demonstrate that highly robust TCGDBs can be realized by the use of tin
oxide (SnO x). Conductivities of up to 3× 10 2 S cm− 1 and an extremely low WVTR on the …
oxide (SnO x). Conductivities of up to 3× 10 2 S cm− 1 and an extremely low WVTR on the …
Synthesis of N-heterocyclic stannylene (Sn (II)) and germylene (Ge (II)) and a Sn (II) amidinate and their application as precursors for atomic layer deposition
SB Kim, P Sinsermsuksakul, RD Pike… - Chemistry of …, 2014 - ACS Publications
Thin films containing germanium or tin have a great variety of current and potential
applications, particularly their oxides or chalcogenides. Chemical vapor deposition (CVD) …
applications, particularly their oxides or chalcogenides. Chemical vapor deposition (CVD) …