Wearable devices with skin-like mechanical properties enable continuous monitoring of the
human body. However, wearable device design has mainly focused on recording superficial …

Piezoelectric microelectromechanical systems (MEMS) offer the opportunity for high-
sensitivity sensors and large displacement, low-voltage actuators. In particular, recent …

d 31 and d 33 mode microelectromechanical systems piezoelectric energy harvesters
(PEHs) were fabricated and compared to investigate their output powers converted from …

Perovskite oxide thin film materials are used in various fields of human life due to their
excellent physical properties. The high performance thin films in turn provide more …

Energy harvesters based on ferroelectric materials, which are capable of converting
mechanical and thermal energies into electric power, have drawn unprecedented attention …

In this paper, the hazardous effects of various volatile organic compounds (VOCs) on human
health and its detection methods have been discussed. This paper also presents the …

This paper presents a voltage-controlled, high-quality factor (Q) composite thin-film bulk
acoustic resonator (FBAR) at 1.28 GHz. The composite FBAR consists of a thin layer of …

Piezoelectric thick films have increasing interest due to the potential high sensitivity and
actuation force for MEMS sensors and actuators. The screen printing technique is a …

In this study, high performance piezoelectric thick films were prepared by depositing only a
few sol–gel infiltrated composite layers on Si/SiO2/Ti/Pt wafers. Lead zirconate titanate (PZT) …

The use of PZT films in sliver‐mode high‐frequency ultrasonic transducers applications
requires thick, dense, and crack‐free films with excellent piezoelectric and dielectric …