Near-ultraviolet Raman and micro-Raman analysis of electronic materials

M Nazari, MW Holtz - Applied Physics Reviews, 2018 - pubs.aip.org
Raman and micro-Raman analysis methods have been extensively investigated for the
study of materials used in electronic and photonic devices. Raman studies are used to …

Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration

C Porret, A Hikavyy, JFG Granados… - ECS Journal of Solid …, 2019 - iopscience.iop.org
As CMOS scaling proceeds with sub-10 nm nodes, new architectures and materials are
implemented to continue increasing performances at constant footprint. Strained and …

Source/drain eSiGe engineering for FinFET technology

J Peng, Y Qi, HC Lo, P Zhao, C Yong… - Semiconductor …, 2017 - iopscience.iop.org
Epitaxy growth loading effect—the growth rate difference between device macros due to
their local open ratio difference—is an important consideration for device design and thus …

Effects of high in-situ source/drain boron do** in p-FinFETs on physical and device performance characteristics

S Shintri, C Yong, B Zhu, S Byrappa, B Fu… - Materials Science in …, 2018 - Elsevier
In this study, the effects of high in-situ boron (B) do** in embedded source/drain (S/D)
silicon germanium (SiGe) stressor of p-channel Fin Field Effect Transistors (FinFETs) in a 14 …

Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration

C Porret, AY Hikavyy, JFG Granados, S Baudot… - ECS …, 2018 - iopscience.iop.org
As CMOS scaling proceeds with sub-10 nm nodes, new architectures and materials are
implemented to continue increasing performances at constant footprint. Strained and …

A 12nm FinFET technology featuring 2nd generation FinFET for low power and high performance applications

HC Lo, D Choi, Y Hu, Y Shen, Y Qi… - … IEEE Symposium on …, 2018 - ieeexplore.ieee.org
We present a state-of-art 12LP FinFET technology with PPA (Performance, Power, and Area)
improvement over 14LPP. 12LP enables> 10% area reduction including a 7.5 T library and …

Impact of 12nm FinFET Technology Variations on TID Effects: A Comparative Study of GF 12LP and 12LP+ at the Transistor Level

AI Vidana, NA Dodds, RN Nowlin… - … on Nuclear Science, 2025 - ieeexplore.ieee.org
This paper presents a comparative analysis of total ionizing dose (TID) response in
GlobalFoundries' 12LP and 12LP+ 12nm bulk FinFET technologies using 10keV X-rays. Our …

Selective Epitaxial Growth of SiGe (: B) for Advanced p-Type Fd-SOI

J Lespiaux, J Kanyandekwe, T Marion, L Saidi… - ECS …, 2024 - iopscience.iop.org
We focus here on various Selective Epitaxial Growth (SEG) processes used during the
manufacturing of advanced p-MOSFET devices:(i) 20 nm thick in-situ boron doped Si0 …

Germanium layer transfer and device fabrication for monolithic 3D integration

A Abedin - 2021 - diva-portal.org
Monolithic three-dimensional (M3D) integration, it has been proposed, can overcome the
limitations of further circuits' performance improvement and functionality expansion. The …

A novel approach to control source/drain cavity profile for device performance improvement

HC Lo, J Peng, E Reis, B Zhu, W Ma… - … on Electron Devices, 2018 - ieeexplore.ieee.org
We present a novel method to form the source/drain (S/D) cavity for pFET performance
improvement—we named this cavity as do**-assisted cavity as its profile is controlled by …