Electron beam lithography on nonplanar and irregular surfaces

C Zhu, H Ekinci, A Pan, B Cui, X Zhu - Microsystems & …, 2024 - nature.com
E-beam lithography is a powerful tool for generating nanostructures and fabricating
nanodevices with fine features approaching a few nanometers in size. However, alternative …

Near-field sub-diffraction photolithography with an elastomeric photomask

S Paik, G Kim, S Chang, S Lee, D **, KY Jeong… - Nature …, 2020 - nature.com
Photolithography is the prevalent microfabrication technology. It needs to meet resolution
and yield demands at a cost that makes it economically viable. However, conventional far …

Grayscale-patterned metal-hydrogel-metal microscavity for dynamic multi-color display

J Zhang, D Wang, Y Ying, H Zhou, X Liu, X Hu… - …, 2021 - degruyter.com
Dynamic structural color based on tunable optical resonance plays a key role in applications
including encryption visualization, camouflage and colorimetric sensing. However, the …

Novel 3D micro-and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers

A Schleunitz, VA Guzenko, M Messerschmidt… - Nano convergence, 2014 - Springer
Micro-and nanostructures with three-dimensional (3D) shapes are needed for a variety of
applications in optics and fluidics where structures with both smooth and sharp features …

Electron beam lithography on irregular surfaces using an evaporated resist

J Zhang, C Con, B Cui - ACS nano, 2014 - ACS Publications
An electron beam resist is typically applied by spin-coating, which cannot be reliably applied
on nonplanar, irregular, or fragile substrates. Here we demonstrate that the popular negative …

Hierarchical, self-assembled metasurfaces via exposure-controlled reflow of block copolymer-derived nanopatterns

AA Kulkarni, GS Doerk - ACS Applied Materials & Interfaces, 2022 - ACS Publications
Nanopatterning for the fabrication of optical metasurfaces entails a need for high-resolution
approaches like electron beam lithography that cannot be readily scaled beyond prototy** …

Radiation damage in polymer films from grazing‐incidence X‐ray scattering measurements

SA Vaselabadi, D Shakarisaz… - Journal of Polymer …, 2016 - Wiley Online Library
Grazing‐incidence X‐ray scattering (GIXS) is widely used to analyze the crystallinity and
nanoscale structure in thin polymer films. However, ionizing radiation will generate free …

Polyvinyl alcohol: a high-resolution hydrogel resist for humidity-sensitive micro-/nanostructure

J Zhang, C Huang, Y Chen, H Wang, Z Gong… - …, 2020 - iopscience.iop.org
A high-resolution nanopatterning technique is desirable with the present rapid development
of hydrogel nanodevices. Here, we demonstrate that polyvinyl alcohol (PVA), a popular …

Polystyrene pocket lithography: sculpting plastic with light

P Samal, JRK Samal, E Gubbins, P Vroemen… - Advanced …, 2022 - Wiley Online Library
Tissue‐culture‐ware polystyrene is the gold standard for in vitro cell culture. While
microengineering techniques can create advanced cell microenvironments in polystyrene …

Effect of electron-beam irradiation on organic semiconductor and its application for transistor-based dosimeters

JJ Kim, JM Ha, HM Lee, HS Raza… - ACS Applied Materials …, 2016 - ACS Publications
The effects of electron-beam irradiation on the organic semiconductor rubrene and its
application as a dosimeter was investigated. Through the measurements of …